MPU9250数据手册(MPU9250).pdf

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InvenSense Inc. 1745 Technology Drive, San Jose, CA 95110 U.S.A. Tel: +1 (408) 988-7339 Fax: +1 (408) 988-8104 Website: www.invensense.com Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 MPU-9250 Product Specification Revision 1.1 Page 1 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 CONTENTS 1 DOCUMENT INFORMATION ...................................................................................................................... 4 1.1 1.2 1.3 1.4 REVISION HISTORY .............................................................................................................................. 4 PURPOSE AND SCOPE .......................................................................................................................... 5 PRODUCT OVERVIEW ........................................................................................................................... 5 APPLICATIONS ..................................................................................................................................... 5 2 FEATURES .................................................................................................................................................. 6 2.1 2.2 2.3 2.4 2.5 GYROSCOPE FEATURES ....................................................................................................................... 6 ACCELEROMETER FEATURES ............................................................................................................... 6 MAGNETOMETER FEATURES................................................................................................................. 6 ADDITIONAL FEATURES ........................................................................................................................ 6 MOTIONPROCESSING ........................................................................................................................... 7 3 ELECTRICAL CHARACTERISTICS ........................................................................................................... 8 3.1 3.2 3.3 3.4 3.5 3.6 3.7 GYROSCOPE SPECIFICATIONS .............................................................................................................. 8 ACCELEROMETER SPECIFICATIONS ....................................................................................................... 9 MAGNETOMETER SPECIFICATIONS ...................................................................................................... 10 ELECTRICAL SPECIFICATIONS ............................................................................................................. 11 I2C TIMING CHARACTERIZATION ......................................................................................................... 15 SPI TIMING CHARACTERIZATION ......................................................................................................... 16 ABSOLUTE MAXIMUM RATINGS ........................................................................................................... 18 4 APPLICATIONS INFORMATION .............................................................................................................. 19 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9 4.10 4.11 4.12 PIN OUT AND SIGNAL DESCRIPTION .................................................................................................... 19 TYPICAL OPERATING CIRCUIT ............................................................................................................. 20 BILL OF MATERIALS FOR EXTERNAL COMPONENTS .............................................................................. 20 BLOCK DIAGRAM ............................................................................................................................... 21 OVERVIEW ........................................................................................................................................ 22 THREE-AXIS MEMS GYROSCOPE WITH 16-BIT ADCS AND SIGNAL CONDITIONING ................................ 22 THREE-AXIS MEMS ACCELEROMETER WITH 16-BIT ADCS AND SIGNAL CONDITIONING ........................ 22 THREE-AXIS MEMS MAGNETOMETER WITH 16-BIT ADCS AND SIGNAL CONDITIONING ......................... 22 DIGITAL MOTION PROCESSOR ............................................................................................................ 22 PRIMARY I2C AND SPI SERIAL COMMUNICATIONS INTERFACES ............................................................ 23 AUXILIARY I2C SERIAL INTERFACE...................................................................................................... 23 SELF-TEST ........................................................................................................................................ 24 4.13 MPU-9250 SOLUTION USING I2C INTERFACE ..................................................................................... 25 Page 2 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 4.14 MPU-9250 SOLUTION USING SPI INTERFACE ..................................................................................... 26 4.15 CLOCKING ......................................................................................................................................... 26 4.16 4.17 4.18 SENSOR DATA REGISTERS ................................................................................................................. 27 FIFO ................................................................................................................................................ 27 INTERRUPTS ...................................................................................................................................... 27 4.19 DIGITAL-OUTPUT TEMPERATURE SENSOR .......................................................................................... 27 4.20 BIAS AND LDO .................................................................................................................................. 28 4.21 CHARGE PUMP .................................................................................................................................. 28 4.22 4.23 STANDARD POWER MODE .................................................................................................................. 28 POWER SEQUENCING REQUIREMENTS AND POWER ON RESET ............................................................ 28 5 ADVANCED HARDWARE FEATURES .................................................................................................... 29 6 PROGRAMMABLE INTERRUPTS ............................................................................................................ 30 6.1 WAKE-ON-MOTION INTERRUPT ........................................................................................................... 30 7 DIGITAL INTERFACE ............................................................................................................................... 32 7.1 7.2 7.3 7.4 7.5 I2C AND SPI SERIAL INTERFACES ...................................................................................................... 32 I2C INTERFACE .................................................................................................................................. 32 I2C COMMUNICATIONS PROTOCOL ..................................................................................................... 32 I2C TERMS ........................................................................................................................................ 35 SPI INTERFACE ................................................................................................................................. 36 8 SERIAL INTERFACE CONSIDERATIONS ............................................................................................... 37 8.1 MPU-9250 SUPPORTED INTERFACES ................................................................................................. 37 9 ASSEMBLY ............................................................................................................................................... 38 9.1 9.2 ORIENTATION OF AXES ...................................................................................................................... 38 PACKAGE DIMENSIONS ...................................................................................................................... 38 10 PART NUMBER PACKAGE MARKING ................................................................................................... 40 11 RELIABILITY ............................................................................................................................................. 41 11.1 QUALIFICATION TEST POLICY ............................................................................................................. 41 11.2 QUALIFICATION TEST PLAN ................................................................................................................ 41 12 REFERENCE ............................................................................................................................................. 42 Page 3 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 1 Document Information 1.1 Revision History Revision Date 12/18/13 06/20/16 Revision Description 1.0 1.1 Initial Release Updated Section 4 Page 4 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 1.2 Purpose and Scope This document provides a description, specifications, and design related information on the MPU-9250 MotionTracking device. The device is housed in a small 3x3x1mm QFN package. Specifications are subject to change without notice. Final specifications will be updated based upon characterization of production silicon. For references to register map and descriptions of individual registers, please refer to the MPU-9250 Register Map and Register Descriptions document. 1.3 Product Overview MPU-9250 is a multi-chip module (MCM) consisting of two dies integrated into a single QFN package. One die houses the 3-Axis gyroscope and the 3-Axis accelerometer. The other die houses the AK8963 3-Axis magnetometer from Asahi Kasei Microdevices Corporation. Hence, the MPU-9250 is a 9-axis MotionTracking device that combines a 3-axis gyroscope, 3-axis accelerometer, 3-axis magnetometer and a Digital Motion Processor™ (DMP) all in a small 3x3x1mm package available as a pin-compatible upgrade from the MPU- 6515. With its dedicated I2C sensor bus, the MPU-9250 directly provides complete 9-axis MotionFusion™ output. The MPU-9250 MotionTracking device, with its 9-axis integration, on-chip MotionFusion™, and run- time calibration firmware, enables manufacturers to eliminate the costly and complex selection, qualification, and system level integration of discrete devices, guaranteeing optimal motion performance for consumers. MPU-9250 is also designed to interface with multiple non-inertial digital sensors, such as pressure sensors, on its auxiliary I2C port. MPU-9250 features three 16-bit analog-to-digital converters (ADCs) for digitizing the gyroscope outputs, three 16-bit ADCs for digitizing the accelerometer outputs, and three 16-bit ADCs for digitizing the magnetometer outputs. For precision tracking of both fast and slow motions, the parts feature a user-programmable gyroscope full-scale range of ±250, ±500, ±1000, and ±2000°/sec (dps), a user-programmable accelerometer full-scale range of ±2g, ±4g, ±8g, and ±16g, and a magnetometer full-scale range of ±4800µT. Other industry-leading features include programmable digital filters, a precision clock with 1% drift from -40°C to 85°C, an embedded temperature sensor, and programmable interrupts. The device features I2C and SPI serial interfaces, a VDD operating range of 2.4V to 3.6V, and a separate digital IO supply, VDDIO from 1.71V to VDD. Communication with all registers of the device is performed using either I2C at 400kHz or SPI at 1MHz. For applications requiring faster communications, the sensor and interrupt registers may be read using SPI at 20MHz. By leveraging its patented and volume-proven CMOS-MEMS fabrication platform, which integrates MEMS wafers with companion CMOS electronics through wafer-level bonding, InvenSense has driven the package size down to a footprint and thickness of 3x3x1mm, to provide a very small yet high performance low cost package. The device provides high robustness by supporting 10,000g shock reliability. 1.4 Applications  Location based services, points of interest, and dead reckoning  Handset and portable gaming  Motion-based game controllers  3D remote controls for Internet connected DTVs and set top boxes, 3D mice  Wearable sensors for health, fitness and sports Page 5 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 2 Features 2.1 Gyroscope Features The triple-axis MEMS gyroscope in the MPU-9250 includes a wide range of features:  Digital-output X-, Y-, and Z-Axis angular rate sensors (gyroscopes) with a user-programmable full- scale range of ±250, ±500, ±1000, and ±2000°/sec and integrated 16-bit ADCs  Digitally-programmable low-pass filter  Gyroscope operating current: 3.2mA  Sleep mode current: 8µA  Factory calibrated sensitivity scale factor  Self-test 2.2 Accelerometer Features The triple-axis MEMS accelerometer in MPU-9250 includes a wide range of features:  Digital-output triple-axis accelerometer with a programmable full scale range of ±2g, ±4g, ±8g and ±16g and integrated 16-bit ADCs  Accelerometer normal operating current: 450µA  Low power accelerometer mode current: 8.4µA at 0.98Hz, 19.8µA at 31.25Hz  Sleep mode current: 8µA  User-programmable interrupts  Wake-on-motion interrupt for low power operation of applications processor  Self-test 2.3 Magnetometer Features The triple-axis MEMS magnetometer in MPU-9250 includes a wide range of features:  3-axis silicon monolithic Hall-effect magnetic sensor with magnetic concentrator  Wide dynamic measurement range and high resolution with lower current consumption.  Output data resolution of 14 bit (0.6µT/LSB)  Full scale measurement range is ±4800µT  Magnetometer normal operating current: 280µA at 8Hz repetition rate  Self-test function with internal magnetic source to confirm magnetic sensor operation on end products 2.4 Additional Features The MPU-9250 includes the following additional features:  Auxiliary master I2C bus for reading data from external sensors (e.g. pressure sensor)  3.5mA operating current when all 9 motion sensing axes and the DMP are enabled  VDD supply voltage range of 2.4 – 3.6V  VDDIO reference voltage for auxiliary I2C devices  Smallest and thinnest QFN package for portable devices: 3x3x1mm  Minimal cross-axis sensitivity between the accelerometer, gyroscope and magnetometer axes  512 byte FIFO buffer enables the applications processor to read the data in bursts  Digital-output temperature sensor  User-programmable digital filters for gyroscope, accelerometer, and temp sensor  10,000 g shock tolerant  400kHz Fast Mode I2C for communicating with all registers  1MHz SPI serial interface for communicating with all registers Page 6 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016  20MHz SPI serial interface for reading sensor and interrupt registers  MEMS structure hermetically sealed and bonded at wafer level  RoHS and Green compliant 2.5 MotionProcessing  Internal Digital Motion Processing™ (DMP™) engine supports advanced MotionProcessing and low power functions such as gesture recognition using programmable interrupts  Low-power pedometer functionality allows the host processor to sleep while the DMP maintains the step count. Page 7 of 42

MPU-9250 Product Specification Document Number: PS-MPU-9250A-01 Revision: 1.1 Release Date: 06/20/2016 3 Electrical Characteristics 3.1 Gyroscope Specifications Typical Operating Circuit of section 4.2, VDD = 2.5V, VDDIO = 2.5V, TA=25°C, unless otherwise noted. PARAMETER Full-Scale Range Gyroscope ADC Word Length Sensitivity Scale Factor Sensitivity Scale Factor Tolerance Sensitivity Scale Factor Variation Over Temperature Nonlinearity Cross-Axis Sensitivity Initial ZRO Tolerance ZRO Variation Over Temperature Total RMS Noise Rate Noise Spectral Density Gyroscope Mechanical Frequencies Low Pass Filter Response Gyroscope Startup Time Output Data Rate CONDITIONS MIN FS_SEL=0 FS_SEL=1 FS_SEL=2 FS_SEL=3 FS_SEL=0 FS_SEL=1 FS_SEL=2 FS_SEL=3 25°C -40°C to +85°C Best fit straight line; 25°C 25°C -40°C to +85°C DLPFCFG=2 (92 Hz) Programmable Range From Sleep mode Programmable, Normal mode 25 5 4 Table 1 Gyroscope Specifications MAX UNITS 29 250 8000 º/s º/s º/s º/s bits LSB/(º/s) LSB/(º/s) LSB/(º/s) LSB/(º/s) % % % % º/s º/s º/s-rms º/s/√Hz KHz Hz ms Hz TYP ±250 ±500 ±1000 ±2000 16 131 65.5 32.8 16.4 ±3 ±4 ±0.1 ±2 ±5 ±30 0.1 0.01 27 35 Page 8 of 42

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