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PKR251说明书.pdf

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    Operating Instructions Compact FullRange™ Gauge FPM sealed PKR 251 BG 805 155 BE / B (2005-08) 1
    Table of Contents Product Identification Validity Intended Use Functional Principle 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 Safety Information 1.4 Liability and Warranty 2 Technical Data 3 Installation 3.1 Installation 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 3.2 Electrical Connection 3.2.1 Use With a Pfeiffer Vacuum Measurement Unit 3.2.2 Use With Another Evaluation Unit 4 Operation 4.1 Measurement Principle, Measuring Behavior 5 Maintenance 5.1 Adjusting the Gauge 5.2 Cleaning the Gauge / Replacing Parts 5.2.1 Disassembling the Gauge 5.2.2 Cleaning the Gauge 5.2.3 Reassembling the Gauge 5.3 What to Do in Case of Problems 6 Removing the Gauge From the Vacuum System 7 Returning the Product 8 Accessories 9 Spare Parts 10 Disposal Appendix A: Measuring Signal vs. Pressure B: Gas Type Dependence Declaration of Contamination For cross references within this document, the symbol (→ XY) is used, for references to other documents, the symbol (→ [Z]). 3 3 3 3 4 4 4 4 4 5 8 8 9 9 9 10 12 12 14 14 15 16 17 18 19 20 21 21 22 23 24 24 26 28 2 BG 805 155 BE / B (2005-08) PKR 251
    Product Identification In all communications with Pfeiffer Vacuum, please specify the information given on the product nameplate. Pfeiffer Vacuum, D - 35614 Asslar Typ: No: F-No: V ; W M U U C A V M T e g n a R l l u F t c a p m o C e g u a G Validity Intended Use This document applies to products with part number PTR26000 PTR26001 PTR26002 (DN 25 ISO-KF flange) (DN 40 ISO-KF flange) (DN 40 CF-F flange) The part number can be taken from the product nameplate. We reserve the right to make technical changes without prior notice. The PKR 251 Compact FullRange™ Gauge has been designed for vacuum measurement in the pressure range of 5×10-9 … 1000 mbar. The PKR 251 can be used with a Pfeiffer Vacuum measurement unit for Compact Gauges or with another evaluation unit. Functional Principle Over the whole measurement range, the measuring signal is output as a logarithm of the pressure. The PKR 251 gauge consists of two separate measurement systems (the Pirani and the cold cathode system according to the inverted magnetron principle). They are combined in such a way that for the user, they behave as one single measure- ment system. BG 805 155 BE / B (2005-08) PKR 251 3
    1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. 1.2 Personnel Qualifications Skilled personnel 1.3 Safety Information 1.4 Liability and Warranty All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the custodian of the product. • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions between the materials (→ 7) and the process media. Consider possible reactions of the process media due to the heat generated by the product. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety information in this document. • Before you begin to work, find out whether any vacuum components are con- taminated. Adhere to the relevant regulations and take the necessary pre- cautions when handling contaminated parts. Pass on the safety information to other users. Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the custodian or third parties • disregard the information in this document • use the product in a non-conforming manner • make any kind of changes (modifications, alterations etc.) to the product • use the product with accessories not listed in the corresponding product documentation. The custodian assumes the responsibility in conjunction with the process media used. 4 BG 805 155 BE / B (2005-08) PKR 251
    2 Technical Data Admissible temperatures Storage Operation Bakeout Relative humidity Use Measurement range (air, N2) Accuracy Reproducibility Gas type dependence Adjustment Pirani measurement circuit trimmer potentiometer trimmer potentiometer Cold cathode measurement circuit -40 °C … +65 °C + 5 °C … +55 °C +150 °C (without electronics unit and magnetic shielding) max. 80% at temperatures ≤+31 °C decreasing to 50% at +40 °C indoors only altitude up to 2000 m (6600 ft) 5×10-9 … 1000 mbar ≈±30% in the range 1×10-8 … 100 mbar ≈±5% in the range 1×10-8 … 100 mbar → Appendix B (→ 14) at <1×10-4 mbar (while depressing the pin) at atmospheric pressure no adjustment (the gauge is adjusted at the factory and requires no main- tenance) Type of protection Maximum pressure (absolute) IP 40 10 bar only for inert gases <55 °C Supply DANGER The gauge may only be connected to supply or measurement units that conform to the requirements of a grounded protective extra-low voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused.1) Voltage at the gauge Power consumption Fuse1) 15.0 … 30.0 VDC (max. ripple 1 Vpp) ≤2 W ≤1 AT The minimum voltage of the power supply must be increased proportionally to the length of the measuring cable. Voltage at the supply unit with maximum cable length 16.0 … 30.0 VDC (max. ripple 1 Vpp) Electrical connection Cable Maximum cable length Hirschmann compact connector type GO 6, 6 pins, male 5 poles plus screening 75 m (0.25 mm² conductor) 100 m (0.34 mm² conductor) 300 m (1.0 mm² conductor) BG 805 155 BE / B (2005-08) PKR 251 1) Pfeiffer Vacuum measurement and control units for Compact Gauges fulfill these requirements. 5
    Operating voltage (in the measuring chamber) Operating current (in the measuring chamber) Output signal (measuring signal) Voltage range Relationship voltage-pressure Error signals Output impedance Minimum load Response time p > 10-6 mbar p = 10-8 mbar Gauge identification Pirani-only mode Combined Pirani / cold cathode mode The following conditions must be fulfilled: Polarity Measurement with constant current with constant voltage Grounding concept Vacuum flange-measurement common Supply common-signal common ≤3.3 kV ≤500 µA ≈0 V … ≈+10.5 V logarithmic, increase 0.6 V / decade (→ Appendix A) <0.5 V (no supply) >9.5 V (Pirani measurement element defective; filament rupture) 2×10 Ω 10 kΩ, short-circuit proof pressure dependent ≈10 ms ≈1 s → Figure 1 11.1 kΩ resistor referenced to supply common 9.1 kΩ resistor referenced to supply common The polarity of pin 1 referenced to supply common is always positive. measurement current within range 0.2 … 0.3 mA measurement voltage within range 2 … 3 V → Figure 1 connected via 10 kΩ (max. voltage differential with respect to safety ±50 V with respect to accuracy ±10 V) conducted separately; differential measurement recommended for cable lengths ≥6 m 6 BG 805 155 BE / B (2005-08) PKR 251
    PTR26000 (DN 25 ISO-KF) Materials exposed to the vacuum Flange Measuring chamber Feedthrough isolation Internal seals Anode Ignition aid Pirani measuring tube Pirani filament Internal volume Dimensions [mm] stainless steel (1.4104) stainless steel (1.4104) ceramic (Al2O3), glass FPM75 Mo stainless steel (1.4310/AISI 301) Ni, Au W ≈ 20 cm³ 101.5 18.5 28 55 20 - F K O S I 0 4 N D F - F C 0 4 N D VACUUM Compact Full RangeTM Gauge 5 , 3 6 ø 24 107 PTR26001 (DN 40 ISO-KF) PTR26002 (DN 40 CF-F) Weight 700 g Materials exposed to the vacuum Flange Measuring chamber Feedthrough isolation Internal seals Anode Ignition aid Pirani measuring tube Pirani filament Internal volume Dimensions [mm] stainless steel (1.4306/AISI 304L) stainless steel (1.4104) ceramic (Al2O3), glass FPM75 Mo stainless steel (1.4310/AISI 301) Ni, Au W ≈ 20 cm³ 101.5 18.5 28 55 20 - F K O S I 0 4 N D F - F C 0 4 N D VACUUM Compact Full RangeTM Gauge 5 , 3 6 ø 24 107 Weight 700 g (DN 40 ISO-KF flange) 950 g (DN 40 CF-F flange) BG 805 155 BE / B (2005-08) PKR 251 7
    3 Installation 3.1 Installation Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. The gauge can be mounted in any orientation. However, it should be mounted so that any particles present cannot penetrate into the measuring chamber (→ 13). See "Technical data" (→ 7) for space requirements. Procedure Remove the protective cap. The protective cap will be needed for maintenance work. Make the flange connection. When making a CF flange connection, it can be advantageous to temporarily remove the magnet unit (→ section 3.1.1). If it should be possible to adjust the gauge while it is connected to the vacuum system, make sure the two and trimmer potentio- meters are accessible for a screw driver. DANGER Caution: overpressure in the vacuum system > 4 bar KF flange connections with elastomer sealing rings (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health. Use sealing rings provided with an outer centering ring. DANGER Caution: overpressure in the vacuum system > 1 bar If clamps are opened unintentionally injury can be caused by catapulted parts. Use the type of clamps which can only be opened and closed by means of a tool (e.g. hose clip clamping ring). DANGER The gauge must be electrically connected to the grounded vacuum chamber. The connection must conform to the re- quirements of protective connection according to EN 61010: • CF flanges fulfill this requirement • For gauges with KF flanges, use a conductive metallic clamping ring. 8 BG 805 155 BE / B (2005-08) PKR 251
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