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关于MEMS学习的经典国外资料.pdf

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    Dedication
    Contents
    Foreword
    Preface
    Author
    Chapter 1. Highlights and Chronological Development History of MEMS Devices Involving Nanotechnology
    Chapter 2. Potential Actuation Mechanisms, Their Performance Capabilities, and Applications
    Chapter 3. Latest and Unique Methods for Actuation
    Chapter 4. Packing, Processing, and Material Requirements for MEMS Devices
    Chapter 5. RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies
    Chapter 6. RF/Microwave MEMS Phase Shifter
    Chapter 7. Applications of Micropumps and Microfluidics
    Chapter 8. Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications
    Chapter 9. Materials for MEMS and Nanotechnology-Based Sensors and Devices
    Index
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page i 8.3.2008 6:13pm Compositor Name: BMani MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications A.R. Jha, Ph.D.
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page ii 8.3.2008 6:13pm Compositor Name: BMani CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2008 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number-13: 978-0-8493-8069-3 (Hardcover) This book contains information obtained from authentic and highly regarded sources Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the validity of all materials or the consequences of their use. The Authors and Publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission to publish in this form has not been obtained. If any copyright material has not been acknowledged please write and let us know so we may rectify in any future reprint Except as permitted under U.S. Copyright Law, no part of this book may be reprinted, reproduced, trans- mitted, or utilized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers. For permission to photocopy or use material electronically from this work, please access www.copyright. com (http://www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC) 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Jha, A. R. p. cm. MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications / A.R. Jha. “An Auerbach title.” Includes bibliographical references and index. ISBN-13: 978-0-8493-8069-3 (alk. paper) ISBN-10: 0-8493-8069-3 (alk. paper) 1. Microelectromechanical systems. 2. Detectors. 3. Telecommunication--Equipment and supplies. 4. Medical instruments and apparatus. 5. Aerospace engineering--Equipment and supplies. 6. Aeronautics--Equipment and supplies. I. Title. TK7875.J485 2008 620’.5--dc22 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com 2007040799
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page iii 8.3.2008 6:13pm Compositor Name: BMani Dedication This book is dedicated to my beloved parents who always encouraged me to pursue advanced research and development studies in the fields of science and latest technology for the benefits to mankind.
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page iv 8.3.2008 6:13pm Compositor Name: BMani
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page v 8.3.2008 6:13pm Compositor Name: BMani Contents Foreword ........................................................................................................... xix Preface ............................................................................................................... xxi Author ............................................................................................................. xxix 1 Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology............................................................... 1 1.1 Introduction.......................................................................................... 1 1.2 What Is MEMS? ................................................................................... 3 1.2.1 Frequently Used Terms in Nanotechnology.............................. 3 1.2.2 2005 MEMS Industry Overview and Sales Projections for MEMS Devices ................................................................... 4 1.3 Potential Applications of MEMS Devices in Commercial and Space Systems................................................................................. 4 1.3.1 MEMS for Wireless, Base Stations, Satellites, and Nanosatellites ..................................................................... 5 1.3.1.1 RF-MEMS Amplifier-Switched Filter Bank Capabilities................................................................. 6 1.3.1.2 Passive RF-MEMS Components ................................ 7 1.3.2 RF-MEMS Technology for Base Station Requirements ............ 9 1.4 MEMS Technology for Military Systems Applications........................ 11 1.4.1 Material Requirements for Fabrication of MEMS Devices................................................................... 13 1.4.2 Types of Nanostructures and Their Properties ........................ 14 1.4.2.1 Surface Plasmon Resonance...................................... 16 1.4.2.2 Ceramics for MEMS Sensors ................................... 17 1.4.3 Fabrication of Critical Elements of a MEMS Device .............. 17 v
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page vi 8.3.2008 6:13pm Compositor Name: BMani vi & 1.4.4 MEMS Technology for Electronic Circuits and Detectors for Military Applications ................................ 19 1.4.4.1 Passive MEMS Devices for Commercial, Military, and Space Applications ............................ 19 1.4.5 Nanotechnology for Armors to Provide Protection to Soldiers ............................................................................. 20 1.4.6 Nanotechnology-Based Biometric Structures to Monitor Soldier Health .................................................... 20 1.4.7 Nanomaterials for External Support Muscles and Artificial Muscles for Injured Soldiers on the Battlefield...................... 21 1.4.8 Robotic Arms for Battlefield Applications ............................. 21 1.4.9 Portable Radar Using MEMS/Nanotechnology for Military Applications ....................................................... 22 1.5 MEMS for Commercial, Industrial, Scientific, and Biomedical System Applications ................................................. 23 1.5.1 Nanotubes and Nanotube Arrays for Various Applications .......................................................................... 23 1.5.2 MEMS-Based Video Projection System ................................ 24 1.5.3 Nanotechnology for Photovoltaic Solar Cells and 3-D Lithium Ion Microbatteries for MEMS Devices.................... 25 1.6 MEMS Technology for Hard-Disk Drives ........................................ 26 1.6.1 MEMS Devices for Thermographic Nondestructive Testing .................................................................................. 27 1.7 MEMS Devices for Uncooled Thermal Imaging Arrays 1.8 and Cooled Focal Planar Arrays for Various Applications.................. 28 Applications of Nanotechnology in IR and Electro-Optical Sensors for Biometric and Security Applications................................ 29 1.8.1 Nanotechnology-Based Laser Scanning Systems .................... 30 1.8.2 MEMS-Based Sensors for Detection of Chemical and Biological Threats........................................................... 31 1.8.3 Potential Applications of Nanophotonic Sensors and Devices........................................................................... 31 1.8.4 MEMS Technology for Photonic Signal Processing and Optical Communications ............................................... 32 1.9 MEMS Technology for Medical Applications ................................... 33 1.10 MEMS Technology for Satellite Communications and Space Systems Applications ........................................................ 34 1.11 MEMS Devices for Auto Industry Applications ................................ 36 1.12 MEMS Technology for Aerospace System Applications .................... 37 1.13 Summary........................................................................................... 38 References .................................................................................................... 39
    A.R. Jha/MEMS and Nanotechnology-Based Sensors and Devices AU8069_C000 Final Proof page vii 8.3.2008 6:13pm Compositor Name: BMani & vii 2 Potential Actuation Mechanisms, Their Performance Capabilities, and Applications ......................................................................................... 41 2.1 Introduction........................................................................................ 41 2.2 Classification of Actuation Mechanisms .............................................. 43 2.3 Structural Requirements and Performance Capabilities of Electrostatic Actuation Mechanism ................................................. 43 2.3.1 Electrostatic Actuation Mechanism ......................................... 43 2.3.1.1 Cantilever Beam Design Requirements .................... 45 2.3.2 Electrostatic Force Computation ............................................. 48 2.3.3 Pull-In and Pull-Out Voltage Requirements ........................... 54 2.3.3.1 Pull-In Voltage......................................................... 57 2.3.3.2 Pull-Out Voltage...................................................... 62 2.3.3.3 Electrostatic Microactuator Configurations for Generating Higher Force and Energy Density Capabilities ................................................. 65 2.4 Piezoelectric Actuation Mechanism ..................................................... 66 2.4.1 Structural Material Requirements for Cantilever Beams .......... 68 2.4.2 Threshold Voltage................................................................... 69 2.4.3 Tip Deflection of the Cantilever Beam ................................... 71 2.4.4 Bending Moment of the Cantilever Beam............................... 71 2.4.5 Contact Force Requirements ................................................... 75 2.5 Electrothermal Actuation Mechanism ................................................. 78 2.6 Electromagnetic Actuation Mechanism ............................................... 83 2.6.1 Pull-In and Pull-Out Magnetomotive Forces .......................... 84 2.6.2 Actuation Force due to Induced Magnetic Force .................... 85 2.6.2.1 Parametric Trade-Off Computations........................ 87 2.7 Electrodynamic Actuation Mechanism ................................................ 88 2.8 Electrochemical Actuation Mechanism................................................ 91 2.8.1 Classification and Major Benefits of CNT .............................. 92 2.8.2 MWCNT Arrays and Electrochemical Actuator Performance ............................................................................ 92 2.8.3 Fabrication and Material Requirements for the Actuator......... 92 2.9 Summary............................................................................................. 94 References .................................................................................................... 95 3 Latest and Unique Methods for Actuation ................................................. 97 3.1 Introduction........................................................................................ 97 3.2 Electrostatic Rotary Microactuator with Improved Shaped Design...... 98 3.2.1 Performance Limitation of Conventional Parallel-Plate Electrodes................................................................................ 99 3.2.2 ESRM with Tilted Configuration ......................................... 100
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