半導體廠自動化之通訊協定 SECS GEM.pdf-资料库

SECS I/II & GEM 870508@itri.org.tw CIMComputer Integrated Manufacturing SECSSEMI Equipment Communication Standard SEMI Semiconductor Equipment and Materials 3 4# 56 &’ 4: $ [1]% ; <= > ? L MN O T 4U International / 0 F G D X & SECS SECS MessageStream Function ICIntegrated Circuit HDLHardware Description Language ] ^ a b d e h i &IC j o %Q 4 s %Q t &y { |} h 4< p 4 < , <4* SEMI SECS 4w 4 u 1. W 2. : 3. 4. 5. 6. 7. 8. : 9. ¡ 10. ¥ 11. ' 12. z 13. 14. › 15. ﬂ 16. p 17. – ƒ § (Equipment Status)& ; (Equipment Control and Diagnostics)& (Material Status) (Material Control)& (Exception Handling)& (Data Collection)& Process Program Management, Recipe& (Control Program Transfer)& (System Errors)& (Terminal Services)& (Host File Services)& (Wafer Mapping)& (Data Set Transfers)& (Object Services)& (Recipe Management)& (Processing Management)& ; (Subsystem Control and Data)& 1 20 http://www.secs.itri.org.tw/ ! " # ( ) * + , - . 1 2 7 8 9 @ A B C D E H I J K P Q R D H S V W Y Z [ \ _ ‘ J c f g b J , - k h l m n p q r \ t u v w x 0 z Y ~ p A h n N T Y - p 8 9 + F F W : ; O ; p g ¢ £ ⁄ ¤ “ § ¤ { « ‹ g ﬁ § ¤ q ¡ ¢ :

· % ¶ 4V 1. F 2. 3. ‰ & (Establish Communication) • … & q I ” 4* 4p (Remote Control) ¿ b ˆ „ & 4. £ 5. ˜ 6. R 7. 8. W 9. z 10. — (Error Message)D % g 4 Stream Function < ⁄ & (Alarm Message)D & (Dynamic Event Report) & ˚ ˝ (Variable Data Collection) & (Status Data Collection) z ˇ 4 { f |# 4C · < ´ · %F ´ 4 SpooledY Spooled 4 Steam Æ 4W D 4 &Y Spooling Function Ł ØŒ · 9 e & † | SECS 4 Function Number 8 Function Number 8 Function Number 0~255? 5 Sn,Fm 8 Ø %æ & ı & 5 4ł æ Ø 5 Stream Number 8 4 Stream Number 4 u 5 Stream Number 0~127 M T | SEMI &S Steam Function W : ; ƒ § Stream Number (n) Function Number (m) 1 2 3 4 5 6 7 8 9 10 0~20 0~50 0~26 0~42 0~18 0~30 0~36 0~4 0~14 0~10 2 20 http://www.secs.itri.org.tw/ † ‡ F \ – G • ‚ # „ ‚ # ﬂ J » ƒ : ; R J ` ´ ⁄ H » … H H ˜ H ¯ ˘ ﬁ D H R D H ˙ ¨ W X ¯ … ﬁ S W { ˛ / X — # „ = C / ” 0 ) — A A „ w p ª ” — ´ J 8 Y º 6 ¯ ‡ ﬂ ´ t u ø œ ß ? n E Ł Y W z { W : ; z { : ; O ˜ H R ˘ ﬁ D H ﬂ : ; p g ¡ ¢ £ ⁄ £ ⁄ ¥ ¤

' : ; ; 11 12 13 14 15 16 17 18 SEMI 0~20 0~16 0~18 0~48 0~28 0~14 0~14 4 Stream Number 12345679 10&SECS 5 RS232 Ø 4 & ø e Message Ø Number + 1Secondary Message ØD Number 5 Y %\ h 4 Stream Function 4s " %\ Number)† &} 5 (D 4 / … Function Number Primary 5 Function ) Y 4 Function … Function h 4 Stream Function ? 50 ( ø %5 R & Stream Function g ` $ 5 < % & ? \ ) 5 Function Number + 1 D S - . V g 4 Stream \ 4 Stream (Standard Mechanical ( Automatic Manufacturing system)0 Function Function Ł InterFace SMIF)49 Stream Function %æ & \ 4 Stream Function Stream Function S1 S1 S1 S1 S1 S1 S1 S1 S1 S1 S1 S1 S2 S2 S2 S2 S2 S2 S2 S2 F1 F2 F3 F4 F5 F6 F9 F10 F11 F12 F13 F14 F13 F14 F15 F16 F17 F18 F21 F22 Are you There On Line Data Selected Status Request Selected Status Request Formatted Status Request Formatted Status Data Material Transfer Status Data Material Transfer Status Data Status Variable Namelist Request Status Variable Namelist Reply Connect Request Connect Request Acknowledge Equipment Constant Request Equipment Constant Data New Equipment Constant Send New Equipment Constant Send Acknowledge Date and Time Request Date and Time Data Remote Command Send Remote Command Acknowledge 3 20 http://www.secs.itri.org.tw/ HostEquip. “ § ¤ ª N z { « ‹ g › ﬁ § ¤ ﬂ p q – ¡ ¢ : V ¿ A Y > Y 7 ’ ( D … K e @ ` … n Q G 8 ! g 6 " } Y ø ‡ # [ ’ ( ’ Q D Y * + , / R ˝ , - ¡ ¢ V 1 \ V ı

S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S2 S3 S3 S3 S3 S3 S3 S4 S4 S4 S4 S4 S4 S5 S5 S5 S5 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34 F35 F36 F37 F38 F39 F40 F41 F42 F43 F44 F47 F48 F49 F50 F65 F66 F85 F86 F87 F88 F1 F2 F11 F12 F13 F14 F1 F2 F3 F5 F17 F18 F1 F2 F3 F4 Trace Initial Send Trace Initial Acknowledge Diagnostic Loopback Request Diagnostic Loopback Data Initiate Processing Request Initiate Processing Acknowledge Equipment Constant Namelist Request Equipment Constant Namelist Reply Date and Time Send Date and Time Acknowledge Define Report Define Report Acknowledge Link Event Report Link Event Report Acknowledge Enable/Disable Event Report Enable/Disable Event Report Acknowledge Multi-Block Inquire Multi-Block Grant Remote Command with Parameters Remote Command Acknowledge Reset Spooling Streams and Functions Reset Spooling Acknowledge Variable Limit Attribute Request Variable Limit Attribute Send Enhanced Remote Command Enhanced Remote Command Acknowledge Reset Spooling Streams and Functions Reset Spooling Streams and Functions Ack. Variable Limit Attribute Request Variable Limit Attribute Send Define Variable Limit Attributes Define Variable Limit Attributes Ack Material Status Request Material Status Data Material ID Request Material ID Request Acknowledge Material ID Send Material ID Acknowledge Ready to Send Material Ready to Send Acknowledge Handshake Complete Not Ready to Send Request to Receive Material Request to Receive Material Acknowledge Alarm Report Send Alarm Report Acknowledge Enable/Disable Alarm Send Enable/Disable Alarm Acknowledge 4 20 http://www.secs.itri.org.tw/

S5 S5 S5 S5 S5 S5 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S6 S7 S7 S7 S7 S7 S7 S7 S7 S7 S7 S7 S7 S9 S9 S9 S9 S9 S9 F5 F6 F7 F8 F73 F73 F1 F2 F3 F4 F5 F6 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F65 F66 F1 F2 F3 F4 F5 F6 F7 F8 F17 F18 F19 F20 F1 F3 F5 F7 F9 F11 List Alarm Request List Alarm Data List Enable Alarm Request List Enable Alarm Acknowledge Alarm Notification Send Alarm Notification Acknowledge Trace Data Send Trace Data Acknowledge Discrete Variable Data Send Discrete Variable Data Acknowledge Multi-block Data Send Inquire Multi-block Grant Formatted Variable Send Formatted Variable Acknowledge Event Report Send Event Report Acknowledge Annotated Event Report Send Annotated Event Report Acknowledge Event Report Request Event Report Data Annotated Event Report Request Annotated Event Report Data Individual Report Request Individual Report Data Annotated Individual Report Request Annotated Individual Report Data Request Spooled Data Request Spooled Data Acknowledgement Send Request Spooled Data Request Spooled Data Acknowledge Process Program Load Inquire Process Program Load Grant Process Program Send Process Program Acknowledge Process Program Request Process Program Data Process Program ID Request Process Program ID Data Delete Process Program Send Delete Process Program Acknowledge Current EPPID Request Current EPPID Data Unrecognized Device ID Unrecognized Stream Type Unrecognized Function Type Illegal Data Transaction Timer Timeout Data Too Long 5 20 http://www.secs.itri.org.tw/

S9 S9 S10 S10 S10 S10 S10 S10 S10 S10 F13 F67 F1 F2 F3 F4 F5 F6 F9 F10 Conversation Timeout Incorrect System Bytes Received Terminal Request Terminal Request Acknowledge Terminal Display Single Terminal Display Single Acknowledge Terminal Display Multi-block Terminal Display Multi-block Acknowledge Broadcast Broadcast Acknowledge SECS Message i %Q 4, „ ’ 4! 43 Y / 4 4 † 8 SECS I [2] SECS II [3]MSECS I 7 = ? Handshake Codes SECS Length Byte 7 i &SECS 4 9 ` Message HeaderChecksum C ; SECS II ; 4 B & SECS I 1. 5 RS232 5 C 8N1 4 ? \ & 2. Baud Rate 300~9600 bpsS 9600 bpsD 19200 bps& 3. = ? & < F SECS Messagew SECS Message T I e ACK G H M Y Checksum NAK O & Binary Code 0000 0101 0000 0100 0000 0101 0001 0101 Hex 05 04 06 15 Function Request to Send Ready to Receive Correct Reception Incorrect Reception ENQ G H Y EOT C M G H = Name ENQ EOT ACK NAK 4. Y « ‹ \ 5 æ Y R Block· ‹ 10~254& ‹ Checksum « ‹ ØT 5. HeaderU 10 « ‹ 10 Bytes&} Stream Function % 6 20 http://www.secs.itri.org.tw/ - 8 9 2 ‡ 5 6 , - ( 9 ` : ; < > @ T / A œ K @ < T … > E F g F g F g h D E $ E F g J f K L M M N Y P > ? @ Q ´ ¶ S D « Q ¶ @ « Q Q Q Y

¶ 4 S 7.99 W ‹ † 5 254 « BlockV ‹ 4 Y 244 « ID No.¡ 32767 Blocks&} Block ¶ &Header · 4 Y m ? Message ID / Stream Function´ ‹ System Bytes&5 RW E P 4 « < Y Header ? Device ø Block Q bit L V Y Block& 6. Checksum2 « % « ‹ 2Bytes& Header Data · 4 4\ B Checksum& 7. R bitR=0 Host Equipment MR=1 Host Equipment& 8. W bitW=0 9. E bitE=0 ] 10. System Bytes’ MW=1 ’ BlockME=1 V Block & Y Block& Primary SECS Message System Bytes _ a Ø Primary Message System BytesSystem Bytes ; ˇ Y 5e \ 4 , &Secondary Message System Byte ( Primary Message System Byte & @ |= ^ 4w Y & < Y SECS Message Block 4K Length Byte 10~254 i ? 9 & Stream No. Function No. & R 0~127 Upper Device ID 0~256 Lower Device ID Upper Message ID W 0~127 0~255 Lower Message ID Upper Block No. E 0~127 Lower Block No. System Bytes System Bytes System Bytes System Bytes 1~255 0~255 0~255 0~255 0~255 0 1 2 3 4 5 6 7 8 9 10 11 ~ 254 255 256 Data 0~255 SECS II Upper Checksum Lower Checksum 0~255 0~255 l 1 « 254 « m l ‹ 7 20 http://www.secs.itri.org.tw/ V X « Q ‡ Q ‹ S Y Q Z [ Z [ R q ¢ « Q « [ æ L F D f Q Q ‹ ’ D ( D f ( } Y p } Y ƒ 9 J ‘ b c d 8 - ’ f B g h … T j « Q ‹ @ m k [ J ´ R q ø ´ R q ø ¡ ¢ K \ Q ‹ Q n

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