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SEMI E5-0200A SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II) This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current changes approved by the North American Regional Standards Committee on September 3, 1999 and December 15, 1999. Initially available on SEMI OnLine January 2000; to be published February 2000. Originally published in 1982; previously published September 1999. to is called NOTE: This document was published twice during the February 2000 (0200) publishing cycle. NOTICE: The user’s attention the possibility that some implementations of this standard, particularly those related to the use of Stream 4, may involve the use of inventions covered by U.S. patents 4,884,674 and 5,216,613, and by other patents issued or pending, held by Texas Instruments Incorporated. By publication of this standard, SEMI takes no position respecting either the applicability or the validity of these or other patent rights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights, and the risk of infringement of such rights, are entirely their own responsibility. CONTENTS 1 Introduction 1.1 Intent 1.2 Overview 1.3 Application 1.4 Applicable Documents 2 Selected Definitions 3 The Message Transfer Protocol 3.1 Intent 3.2 Messages 3.2 Blocking Requirements 3.2 Message Header 3.2 The Transaction Timeout 3.2 Multiple Open Transaction 4 Streams and Functions 4.1 Streams 4.2 Functions 4.3 Stream and Function Allocation 5 Transaction and Conversation Protocols 5.1 Intent 5.2 Transaction Definition 5.3 Transaction Level Requirements 5.4 Conversation Protocols 6 Data Structures 6.1 Intent 6.2 Item 6.3 List 6.4 Localized Character String Items 6.5 Example Data Structures 6.6 Data Item Dictionary 6.7 Variable Item Dictionary 6.8 Object Dictionary 7 Message Detail 7.1 Intent 7.4 Stream 0 and Function 0 7.5 Stream 1 Equipment Status S1,F0 Abort Transaction (S1F0) S1,F1 Are You There Request (R) S1,F2 On Line Data (D) S1,F3 Selected Equipment Status Request (SSR) Selected Equipment Status Data (SSD) Formatted Status Request (FSR) Formatted Status Data (FSD) Fixed Form Request (FFR) Fixed Form Data (FFD) S1,F4 S1,F5 S1,F6 S1,F7 S1,F8 S1,F9 Material Transfer Status Request (TSR) S1,F10 Material Transfer Status Data (TSD) S1,F11 Status Variable NameList Request S1,F12 Status Variable NameList Reply (SVNR) (SVNRR) S1,F13 Establish Communications Request (CR) S1,F14 Establish Communications Request Acknowledge (CRA) S1,F15 Request OFF-LINE (ROFL) S1,F16 OFF-LINE Acknowledge (OFLA) S1,F17 Request ON-LINE (RONL) S1,F18 ON-LINE Acknowledge (ONLA) Macro Level Messages S1,F19 Get Attribute (GA) S1,F20 Attribute Data (AD) 7.6 Stream 2 Equipment Control and Diagnostics S2,F0 Abort Transaction (S2F0) S2,F1 S2,F2 Service Program Load Inquire (SPI) Service Program Load Grant (SPG) 1 SEMI E5-0200A © SEMI 1982, 2000

S2,F3 S2,F4 S2,F5 S2,F6 S2,F7 S2,F8 Service Program Send (SPS) Service Program Send Acknowledge (SPA) Service Program Load Request (SPR) Service Program Load Data (SPD) Service Program Run Send (CSS) Service Program Run Acknowledge (CSA) Service Program Results Request (SRR) S2,F9 S2,F10 Service Program Results Data (SRD) S2,F11 Service Program Directory Request S2,F12 Service Program Directory Data (SDD) S2,F13 Equipment Constant Request (ECR) S2,F14 Equipment Constant Data (ECD) S2,F15 New Equipment Constant Send (ECS) S2,F16 New Equipment Constant Acknowledge (SDR) (ECA) S2,F17 Date and Time Request (DTR) S2,F18 Date and Time Data (DTD) S2,F19 Reset/Initialize Send (RIS) S2,F20 Reset Acknowledge (RIA) S2,F21 Remote Command Send (RCS) S2,F22 Remote Command Acknowledge (RCA) S2,F23 Trace Initialize Send (TIS) S2,F24 Trace Initialize Acknowledge (TIA) S2,F25 Loopback Diagnostic Request (LDR) S2,F26 Loopback Diagnostic Data (LDD) S2,F27 Initiate Processing Request (IPR) S2,F28 Initiate Processing Acknowledge (IPA) S2,F29 Equipment Constant Namelist Request (ECNR) S2,F30 Equipment Constant Namelist (ECN) S2,F31 Date and Time Set Request (DTS) S2,F32 Date and Time Set Acknowledge (DTA) S2,F33 Define Report (DR) S2,F34 Define Report Acknowledge (DRA) S2,F35 Link Event Report (LER) S2,F36 Link Event Report Acknowledge (LERA) S2,F37 Enable/Disable Event Report (EDER) S2,F38 Enable/Disable Event Report Acknowledge (EERA) S2,F39 Multi-block Inquire (DMBI) S2,F40 Multi-block Grant (DMBG) S2,F41 Host Command Send (HCS) S2,F42 Host Command Acknowledge (HCA) S2,F43 Reset Spooling Streams and Functions S2,F44 Reset Spooling Acknowledge (RSA) S2,F45 Define Variable Limit Attributes S2,F46 Variable Limit Attribute Acknowledge S2,F47 Variable Limit Attribute Request (RSSF) (DVLA) (VLAA) (VLAR) S2,F48 Variable Limit Attribute Send (VLAS) S2,F49 Enhanced Remote Command S2,F50 Enhanced Remote Command Acknowledge 7.7 Stream 3 Material Status S3,F0 Abort Transaction (S3F0) S3,F1 Material Status Request (MSR) S3,F2 Material Status Data (MSD) S3,F3 Time to Completion Request (TCR) S3,F4 Time to Completion Data (TCD) S3,F5 Material Found Send (MFS) S3,F6 Material Found Acknowledge (MFA) S3,F7 Material Lost Send (MLS) S3,F8 Material Lost Acknowledge (MLA) S3,F9 Material ID Equate Send (IES) S3,F10 Material ID Equate Acknowledge (IEA) S3,F11 Material ID Request (MIDR) S3,F12 Material ID Request Acknowledge (MIRA) S3,F13 Material ID Send (MIS) S3,F14 Material ID Acknowledge (MIA) S3,F15 Materials Multi-Block Inquire (MMBI) S3,F16 Materials Multi-Block Grant (MMBG) S3,F17 Carrier Action Request S3,F18 Carrier Action Acknowledge S3,F19 Cancel All Carrier Out Request S3,F20 Cancel All Carrier Out Acknowledge S3,F21 Port Group Definition S3,F22 Port Group Definition Acknowledge S3,F23 Port Group Action Request S3,F24 Port Group Action Acknowledge S3,F25 Port Action Request S3,F26 Port Action Acknowledge 7.8 Stream 4 Material Control Send Material (SMN) S4,F0 Abort Transaction (S4F0) S4,F1 Ready to Send Material (RSN) S4,F2 Ready to Send Acknowledge (RSA) S4,F3 S4,F4 Not Used S4,F5 Handshake Complete (HCN) S4,F6 Not Used S4,F7 Not Ready to Send (ABN) S4,F8 Not Used S4,F9 S4,F10 Not Used S4,F11 Stuck in Receiver (SRN) S4,F12 Not Used S4,F13 Send Incomplete Timeout (SIN) S4,F14 Not Used S4,F15 Material Received (MRN) S4,F16 Not Used S4,F17 Request to Receive (RTR) S4,F18 Request to Receive Acknowledge (RRA) Stuck in Sender (SSN) SEMI E5-0200A © SEMI 1982, 2000 2

Macro Level Messages S4,F19 Transfer Job Create (TJ) S4,F20 Transfer Job Acknowledge (TJA) S4,F21 Transfer Job Command (TJC) S4,F22 Transfer Command Acknowledge (TCA) S4,F23 Transfer Job Alert (TJA) S4,F24 Transfer Alert Acknowledge (TLA) S4,F25 Multi-Block Inquire (MBI4) S4,F26 Multi-Block Grant (MBG4) Micro Level Messages S4,F27 Handoff Ready (HR) S4,F28 Not Used S4,F29 Handoff Command (HC) S4,F30 Not Used S4,F31 Handoff Command Complete (HCC) S4,F32 Not Used S4,F33 Handoff Verify (HV) S4,F34 Not Used S4,F35 Handoff Cancel Ready (HCR) S4,F36 Not Used S4,F37 Handoff Cancel Ready Acknowledge (HCA) S4,F38 Not Used S4,F39 Handoff Halt (HH) S4,F40 Not Used S4,F41 Handoff Halt Acknowledge (HHA) S4,F42 Not Used 7.9 Stream 5 Exception Handling S5,F0 Abort Transaction (S5F0) S5,F1 Alarm Report Send (ARS) S5,F2 Alarm Report Acknowledge (ARA) S5,F3 Enable/Disable Alarm Send (EAS) S5,F4 Enable/Disable Alarm Acknowledge (EAA) S5,F5 List Alarms Request (LAR) S5,F6 List Alarm Data (LAD) S5,F7 List Enabled Alarm Request (LEAR) S5,F8 List Enabled Alarm Data (LEAD) S5,F9 Exception Post Notify (EXPN) S5,F10 Exception Post Confirm (EXPC) S5,F11 Exception Clear Notify (EXCN) S5,F12 Exception Clear Confirm (EXCC) S5,F13 Exception Recover Request (EXRR) S5,F14 Exception Recover Acknowledge S5,F15 Exception Recovery Complete Notify (EXRA) (EXRCN) (EXRCC) (EXRAR) S5,F16 Exception Recovery Complete Confirm S5,F17 Exception Recovery Abort Request S5,F18 Exception Recovery Abort Acknowledge (EXRAA) 7.10 Stream 6 Data Collection (FVA) (AERA) (AERR) S6,F0 Abort Transaction (S6F0) S6,F1 Trace Data Send (TDS) S6,F2 Trace Data Acknowledge (TDA) S6,F3 Discrete Variable Data Send (DVS) S6,F4 Discrete Variable Data Acknowledge (DVA) S6,F5 Multi-block Data Send Inquire (MBI) S6,F6 Multi-block Grant (MBG) S6,F7 Data Transfer Request (DDR) S6,F8 Data Transfer Data (DDD) S6,F9 S6,F10 Formatted Variable Acknowledge Formatted Variable Send (FVS) S6,F11 Event Report Send (ERS) S6,F12 Event Report Acknowledge (ERA) S6,F13 Annotated Event Report Send (AERS) S6,F14 Annotated Event Report Acknowledge S6,F15 Event Report Request (ERR) S6,F16 Event Report Data (ERD) S6,F17 Annotated Event Report Request S6,F18 Annotated Event Report Data (AERD) S6,F19 Individual Report Request (IRR) S6,F20 Individual Report Data (IRD) S6,F21 Annotated Individual Report (AIR) S6,F22 Annotated Individual Report Data (AIRD) S6,F23 Request Spooled Data (RSD) S6,F24 Request Spooled Data Acknowledgement Send (RSDAS) S6,F25 Notification Report Send S6,F26 Notification Report Send Acknowledge S6,F27 Trace Report Send (TRS) S6,F28 Trace Report Send Acknowledge (TRSA) S6,F29 Trace Report Request (TRR) S6,F30 Trace Report Data (TRD) 7.11 Stream 7 Process Program Management Process Program Load Inquire (PPI) Process Program Load Grant (PPG) Process Program Send (PPS) Process Program Acknowledge (PPA) Process Program Request (PPR) Process Program Data (PPD) Process Program ID Request (PIR) Process Program ID Data (PID) S7,F0 Abort Transaction (S7F0) S7,F1 S7,F2 S7,F3 S7,F4 S7,F5 S7,F6 S7,F7 S7,F8 S7,F9 M/P M Request (MMR) S7,F10 M/P M Data (MMD) S7,F11 M/P M Update Send (UMS) S7,F12 M/P M Update Acknowledge (UMA) S7,F13 Delete M/P M Entry Send (DES) 3 SEMI E5-0200A © SEMI 1982, 2000

S7,F14 Delete M/P M Entry Acknowledge S7,F15 Matrix Mode Select Send (MMS) S7,F16 Matrix Mode Select Acknowledge S7,F17 Delete Process Program Send (DPS) S7,F18 Delete Process Program Acknowledge S7,F19 Current EPPD Request (RER) S7,F20 Current EPPD Data (RED) S7,F21 Equipment Process Capabilities Request S7,F22 Equipment Process Capabilities Data S7,F23 Formatted Process Program Send (FPS) S7,F24 Formatted Process Program Acknowledge (FPA) S7,F25 Formatted Process Program Request S7,F26 Formatted Process Program Data (FPD) S7,F27 Process Program Verification Send S7,F28 Process Program Verification Acknowledge (PVA) S7,F29 Process program Verification Inquire (DEA) (MMA) (DPA) (PCR) (PCD) (FPR) (PVS) (PVI) (PVG) (VRA) (PAR) (PAD) (PPMR) S7,F30 Process Program Verification Grant S7,F31 Verification Request Send (VRS) S7,F32 Verification Request Acknowledge S7,F33 Process Program Available Request S7,F34 Process Program Availability Data S7,F35 Process Program for MID Request S7,F36 Process Program for MID Data (PPMD) 7.12 Stream 8 Control Program Transfer S8,F0 Abort Transaction (S8F0) S8,F1 Boot Program Request (BPR) S8,F2 Boot Program Data (BPD) S8,F3 Executive Program Request (EPR) S8,F4 Executive Program Data (EPD) 7.13 Stream 9 System Errors S9,F0 Abort Transaction (S9F0) S9,F1 Unrecognized Device ID (UDN) S9,F2 Not Used S9,F3 Unrecognized Stream Type (USN) S9,F4 Not Used S9,F5 Unrecognized Function Type (UFN) S9,F6 Not Used S9,F7 S9,F8 Not Used S9,F9 Transaction Timer Timeout (TTN) Illegal Data (IDN) SEMI E5-0200A © SEMI 1982, 2000 4 S9,F10 Not Used S9,F11 Data Too Long (DLN) S9,F12 Not Used S9,F13 Conversation Timeout (CTN) S9,F14 Not Used 7.14 Stream 10 Terminal Services S10,F0 Abort Transaction (S10F0) S10,F1 Terminal Request (TRN) S10,F2 Terminal Request Acknowledge (TRA) S10,F3 Terminal Display, Single (VTN) S10,F4 Terminal Display, Single Acknowledge (VTA) S10,F5 Terminal Display, Multi-block (VTN) S10,F6 Terminal Display, Multi-block Acknowledge (VMA) S10,F7 Multi-block Not Allowed (MNN) S10,F8 Not Used S10,F9 Broadcast (BCN) S10,F10 Broadcast Acknowledge (BCA) 7.15 Stream 11 Host File Services (Deleted) 7.16 Stream 12 Wafer Mapping Abort Transaction (S12F0) S12,F0 S12,F1 Map Set-Up Data Send (MSDS) S12,F2 Map Set-up Data Acknowledge (MSDA) S12,F3 Map Set-up Data Request (MSDR) S12,F4 Map Set-up Data (MSD) S12,F5 Map Transmit Inquire (MAPTI) S12,F6 Map Transmit Grant (MAPTG) S12,F7 Map Data Send Type 1 (MDS1) S12,F8 Map Data Acknowledge Type 1 S12,F9 Map Data Send Type 2 (MDS2) S12,F10 Map Data Acknowledge Type 2 (MDA1) (MDA2) S12,F11 Map Data Send Type 3 (MDS3) S12,F12 Map Data Acknowledge 3 (MDA3) S12,F13 Map Data Request Type 1 (MDR1) S12,F14 Map Data Type 1 (MD1) S12,F15 Map Data Request Type 2 (MDR2) S12,F16 Map Data Type 2 (MD2) S12,F17 Map Data Request Type 3 (MDR3) S12,F18 Map Data Type 3 (MD3) S12,F19 Map Error Report Send (MERS) S12,F20 Not Used 7.17 Stream 13 Data Set Transfers S13,F0 Abort Transaction (S13F0) Send Data Set Send (DSSS) S13,F1 S13,F2 Send Data Set Acknowledge (DSSA) S13,F3 Open Data Set Request (DSOR) S13,F4 Open Data Set Data (DSOD) S13,F5 S13,F6 S13,F7 Read Data Set Request (DSRR) Read Data Set Data (DSRD) Close Data Set Send (DSCS)

Close Data Set Acknowledge (DSCA) Reset Data Set Send (DSRS) S13,F8 S13,F9 S13,F10 Reset Data Set Acknowledge (DSRA) S13,F11 Data Set Object Multi-Block Inquire S13,F12 Data Set Object Multi-Block Grant (DSOMGI) (DSOMBG) S13,F13 Table Data Send (TDS) S13,F14 Table Data Acknowledge (TDA) S13,F15 Table Data Request (TDR) S13,F16 Table Data (TD) 7.18 Stream 14 Object Services SetAttr Request (SAR) SetAttr Data (SAD) S14,F0 Abort Transaction (S14F0) S14,F1 GetAttr Request (GAR) S14,F2 GetAttr Data (GAD) S14,F3 S14,F4 S14,F5 GetType Request (GTR) S14,F6 GetType Data (GTD) S14,F7 GetAttrName Request (GANR) S14,F8 GetAttrName Data (GAND) S14,F9 Create Object Request (COR) S14,F10 Create Object Acknowledge (CAO) S14,F11 Delete Object Request S14,F12 Delete Object Acknowledge (DOA) S14,F13 Object Attach Request (OAR) S14,F14 Object Attach Acknowledge (OAA) S14,F15 Attached Object Action Request S14,F16 Attached Object Action Acknowledge S14,F17 Supervised Object Action Request (AOAR) AOAA) SOAR) S14,F18 Supervised Object Action Acknowledge (SOAA) 7.19 Stream 15 Recipe Management S15,F0 Abort Transaction (S15F0) S15,F1 S15,F2 S15,F3 S15,F4 S15,F5 S15,F6 Recipe Management Multi-block Inquire Recipe Management Multi-block Grant Recipe Namespace Action Request Recipe Namespace Action Acknowledge Recipe Namespace Rename Request Recipe Namespace Rename Acknowledge Recipe Space Request Recipe Space Data Recipe Status Request S15,F7 S15,F8 S15,F9 S15,F10 Recipe Status Data S15,F11 Recipe Version Request S15,F12 Recipe Version Data S15,F13 Recipe Create Request S15,F14 Recipe Create Acknowledge S15,F15 Recipe Store Request S15,F16 Recipe Store Acknowledge S15,F17 Recipe Retrieve Request S15,F18 Recipe Retrieve Data S15,F19 Recipe Rename Request S15,F20 Recipe Rename Acknowledge S15,F21 Recipe Action Request S15,F22 Recipe Action Acknowledge S15,F23 Recipe Descriptor Request S15,F24 Recipe Descriptor Data S15,F25 Recipe Parameter Update Request S15,F26 Recipe Parameter Update Acknowledge S15,F27 Recipe Download Request S15,F28 Recipe Download Acknowledge S15,F29 Recipe Verify Request S15,F30 Recipe Verify Acknowledge S15,F31 Recipe Unload Request S15,F32 Recipe Unload Data S15,F33 Recipe Select Request S15,F34 Recipe Select Acknowledge S15,F35 Recipe Delete Request S15,F36 Recipe Delete Acknowledge S15,F37 DRNS Segment Approve Action S15,F38 DRNS Segment Approve Action S15,F39 DRNS Recorder Segment Request S15,F40 DRNS Recorder Segment Request Acknowledge Acknowledge S15,F41 DRNS Recorder Modify Request S15,F42 DRNS Recorder Modify Acknowledge S15,F43 DRNS Get Change Request S15,F44 DRNS Get Change Request Data S15,F45 DRNS Manager Segment Change S15,F46 DRNS Manager Segment Approval Approval Request Acknowledge S15,F47 DRNS Manager Rebuild Request S15,F48 DRNS Manager Rebuild Acknowledge 7.20 Stream 16 Processing Management S16,F0 Abort Transaction (S16F0) S16,F1 Multi-block Process Job Data Inquire (PRJI) S16,F2 Multi-block Process Job Data Grant S16,F3 S16,F4 S16,F5 S16,F6 S16,F7 S16,F8 (PRJG) Process Job Create Request (PRJCR) Process Job Create Acknowledge (PRJCA) Process Job Command Request (PRJCMDR) Process Job Command Acknowledge (PRJCMDA) Process Job Alert Notify (PRJA) Process Job Alert Confirm (PRJAC) 5 SEMI E5-0200A © SEMI 1982, 2000

A1. The General Node Transaction Protocol A2. Some Suggested Message Usage A3. Notes on SECS-II Data Transfers A4. Process Programs A5. Suggested Baseline SECS Equipment Implementation Process Job Event Notify (PRJE) S16,F9 S16,F10 Process Job Event Confirm (PRJEC) 7.21 Stream 17 Equipment Control and Diagnostics S17,F0 Abort Transaction (S17F0) S17,F1 Data Report Create Request (DRC) S17,F2 Data Report Create Acknowledge (DRCA) S17,F3 Data Report Delete Request (DRD) S17,F4 Data Report Delete Acknowledge S17,F5 S17,F6 S17,F7 S17,F8 S17,F9 (DRDA) Trace Create Request (TRC) Trace Create Acknowledge (TRCA) Trace Delete Request (TRD) Trace Delete Acknowledge (TRDA) Collection Event Link Request (CELR) S17,F10 Collection Event Link Acknowledge S17,F11 Collection Event Unlink Request S17,F12 Collection Event Unlink Acknowledge (CELA) (CEUR) (CEUA) (TRRA) S17,F13 Trace Reset Request (TRR) S17,F14 Trace Report Reset Acknowledge 7.22 Stream 18 Subsystem Control and Data Read Request (RR) Read Data (RD) Read Attribute Request (RAR) Read Attribute Data (RAD) S18,F1 S18,F2 S18,F3 Write Attribute Request (WAR) S18,F4 Write Attribute Acknowledge (WAA) S18,F5 S18,F6 S18,F7 Write Data Request (WDR) S18,F8 Write Data Acknowledge (WDA) S18,F9 S18,F10 Read ID Data (RID) S18,F11 Write ID Request (WIR) S18,F12 Write ID Acknowledge (WIA) S18,F13 Subsystem Command Request (SCR) S18,F14 Subsystem Command Acknowledge Read ID Request (RIR) (SCA) 8 Message Documentation 8.1 Intent 8.2 Standard Form SECS-II Document 9 Units of Measure 9.1 Intent 9.2 Units Symbol 9.3 Compliance 9.4 SECS-II Units of Measure Identifiers Application Notes SEMI E5-0200A © SEMI 1982, 2000 6

SEMI E5-0200A SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II) This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current changes approved by the North American Regional Standards Committee on September 3, 1999 and December 15, 1999. Initially available on SEMI OnLine January 2000; to be published February 2000. Originally published in 1982; previously published September 1999. to is called NOTE: This document was published twice during the February 2000 (0200) publishing cycle. NOTICE: The user’s attention the possibility that some implementations of this standard, particularly those related to the use of Stream 4, may involve the use of inventions covered by U.S. patents 4,884,674 and 5,216,613, and by other patents issued or pending, held by Texas Instruments Incorporated. By publication of this standard, SEMI takes no position respecting either the applicability or the validity of these or other patent rights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights, and the risk of infringement of such rights, are entirely their own responsibility. alternative message in cooperation with 1 Introduction 1.1 Intent — The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This specification has been developed the Japan Electronic Industry Development Association Committee 12 on Equipment Communications. 1.1.1 It is the intent of this standard to be fully compatible with SEMI Equipment Communications Standard E4 (SECS-I). It is also the intent to allow for compatibility with transfer protocols. The details of the message transfer protocol requirements are contained in Section 3. 1.1.2 It is the intent of this standard to define messages to such a level of detail that some consistent host soft- ware may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host. 1.1.3 The messages defined in the standard support the most typical activities required for IC manufacturing. The standard also provides for the definition of equip- ment-specific messages to support those activities not covered by the standard messages. While certain activ- ities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment. 1.2 Overview — SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I. 1.2.1 SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity. 1.2.2 SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message. 1.2.3 The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some mini- mum requirements on any SECS-II implementation. 1.3 Application — SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices. Examples of the activities supported by the standard are: transfer of control programs, material movement information, measurement data, summarized test data, and alarms. 1.3.1 The minimum compliance to this standard involves meeting the few constraints outlined in Section 5. It is expected that a given piece of equipment will require only a subset of the functions described in this standard. The number of functions and the selection of functions will depend upon the equipment capabilities and requirements. For each piece of equipment, the exact format for each function provided must be docu- mented according to the form outlined in Section 7. 1.3.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS- II. It is assumed the host will support equipment implementation. 7 SEMI E5-0200A © SEMI 1982, 2000

1.4 Applicable Documents 1.4.1 ANSI1 X3.4-1977 — Code for Information Interchange (ASCII) 1.4.2 IEEE2 754 — Standard for Binary Floating Point Arithmetic 1.4.3 SEMI Standards3 SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) SEMI E6 — Facilities Guideline and Format Interface Specifications 1.4.4 The Japan Electronic Industry Development Association (JEIDA) has requested that the SECS-II standard incorporate support for the JIS-8 codes for data exchange. This code would allow support for katakana characters in Japanese implementations of SECS-II. JIS 8-bit Coded Character Set for information Interchange, Japanese Industrial Standards. NOTE 1: As listed or revised, all documents cited shall be the latest publications of adopted standards. 1.5 This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. (JIS-6226) 2 Selected Definitions 2.1 The following brief definitions refer to sections providing further information. 2.1.1 block — a physical division of a message used by the message transfer protocol (see Section 3.3). 2.1.2 conversation — a sequence of related messages (see Section 5.4). 2.1.3 conversation timeout — an indication that a conversation has not completed properly (see Section 5.4.1). 2.1.4 device ID — a number between 0 and 32767 used in identifying the particular piece of equipment communicating with a host (see Section 3.4.1). 2.1.5 equipment — the intelligent system which communicates with a host. 1 ANSI, 1430 Broadway, New York, NY 10018 2 IEEE Service Center, 445 Hoe Lane, Piscataway, NJ 08854 3 SEMI, 805 E. Middlefield Road, Mountain View, CA 94043 SEMI E5-0200A © SEMI 1982, 2000 8 the intelligent system which 2.1.6 function — a specific message for a specific activity within a stream (see Section 4.2). 2.1.7 host — communicates with the equipment. 2.1.8 interpreter — the system that interprets a primary message and generates a reply when requested (see Section 3.2). 2.1.9 item — a data element within a message (see Section 6.2). 2.1.10 item format — a code used to identify the data type of an item (see Section 6.2). 2.1.11 list — a group of items (see Section 6.3). 2.1.12 message — a complete unit of communication (see Section 3.2). 2.1.13 message header — information about the message passed by the message transfer protocol (see Section 3.4). 2.1.14 multi-block message — a message sent in more than one block by the message transfer protocol (see Section 3.3.2). 2.1.15 originator — the creator of a primary message (see Section 3.2). 2.1.16 packet — a physical division of a message used by the message transfer protocol (see Section 3.3). 2.1.17 primary message — an odd numbered message. Also, the first message of a transaction (see Sections 3.2 and 4.2). 2.1.18 reply — the particular secondary message corresponding to a primary message (see Sections 3.2 and 4.2). 2.1.19 secondary message — an even-numbered message. Also the second message of a transaction (see Sections 3.2 and 4.2). 2.1.20 single-block message — a message sent in one block by the message transfer protocol (see Section 3.3.1). 2.1.21 stream — a category of messages (see Section 4.1). 2.1.22 transaction — a primary message and its associated secondary message, if any (see Section 5.2). 2.1.23 transaction timeout — an indication from the message transfer protocol that a transaction has not completed properly (see Section 3.5). 3 The Message Transfer Pro tocol 3.1 Intent — SECS-II is fully compatible with the message transfer protocol defined by SECS-I. It is the

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