SCA103T 中文手册.pdf-资料库

SCA103T Series Data Sheet SCA103T SCA103T 系列是 3D-MEMS技术的单轴倾角传感器，其使用差分测量原理。其高校正精度结合极低的温度依赖性、高分辨率、低噪声和传感元件坚固耐用的设计等特点，使得SCA103T是高精度水平仪器的理想选择。VTI的倾角传感器由于具有过阻尼的传感元件，其对高频的振动不敏感，且其能承受的20000g的机械冲击。差分倾角传感器系列主要特征： • 测量范围： ±15° SCA103T-D04 以及 ± 30° SCA103T-D05 • 0.001 分辨率 (10 Hz 带宽，模拟端输出) • 传感单元受过阻尼控制，频率响应 (-3dB 18Hz) • 坚固耐用设计高抗振性(20000g) • 温度与时间下卓越的稳定性 • 使用差分测量原理，减小了共模误差和噪声 • 公制比例模拟电压输出 • 数字SPI倾角与温度数据输出 • 全面的故障自探测功能 o True self test by deflecting the sensing elements’ proof mass by electrostatic force. o Continuous sensing element interconnection o Continuous memory parity check. failure check. • 符合RoHS要求 • 可用无铅回流焊加工 • 水准测量仪 • 建筑物水平测量 12 VDD • 单电源 +5 V 供电应用： • 平台水平与稳定 • 旋转激光水平仪 Sensing element 1 Signal conditioning and filtering 10 ST_1 Self test 1 9 ST_2 Self test 2 EEPROM calibration memory Temperature Sensor Sensing element 2 Signal conditioning and filtering Figure 1. 内部功能框图 11 OUT_1 1 SCK 3 MISO 4 MOSI 7 CSB 5 OUT_2 A/D conversion SPI interface 6 GND 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 1/19 Rev.A

TABLE OF CONTENTS SCA103T Series The SCA103T Differential Inclinometer Series .......................................................................1 特征 .. ..............................................................................................................................................1 应用　　 .........................................................................................................................................1 Table of Contents .....................................................................................................................2 1 Electrical Specifications.....................................................................................................3 1.1 Absolute Maximum Ratings......................................................................................................3 1.2 Performance Characteristics....................................................................................................3 1.3 Electrical Characteristics..........................................................................................................4 1.4 SPI Interface DC Characteristics..............................................................................................4 1.5 SPI Interface AC Characteristics..............................................................................................4 1.6 SPI Interface Timing Specifications.........................................................................................5 1.7 Electrical Connection ................................................................................................................6 1.8 Typical Performance Characteristics.......................................................................................6 1.8.1 Additional External Compensation ........................................................................................7 2 Functional Description .......................................................................................................9 2.1 Differential Measurement..........................................................................................................9 2.2 Voltage to Angle Conversion....................................................................................................9 2.3 Ratiometric Output ..................................................................................................................10 2.4 SPI Serial Interface ..................................................................................................................10 2.5 Digital Output to Angle Conversion.......................................................................................13 2.6 Self Test and Failure Detection Modes..................................................................................14 2.7 Temperature Measurement.....................................................................................................15 3 Application Information....................................................................................................16 3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ................................16 3.2 Recommended Printed Circuit Board Footprint ...................................................................17 4 Mechanical Specifications and Reflow Soldering ..........................................................17 4.1 Mechanical Specifications (Reference only).........................................................................17 4.2 Reflow Soldering......................................................................................................................18 5 Document Change Control...............................................................................................19 6 Contact Information ..........................................................................................................19 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 2/19 Rev.A

1 电气规格： SCA103T Series The SCA103T product family consists of two versions, the SCA103T-D04 and the SCA103T-D05, that differ in measurement range. The specific performance specifications related to each version are listed in the table “SCA103T performance characteristics” below. All other specifications are common to both versions. The supply voltage is Vdd=5.00V and ambient temperature unless otherwise specified. Parameters marked as D are valid when measured in differential mode using an external differential amplifier. Parameters marked with S are for a single measurement channel. The performance of the selected amplifier may have an effect on some parameters. The differential signal is determined as Out_diff = Out1 – Out2. 1.1 最大限度额定值供电电压（VDD）输入/输出电压存储温度工作温度机械抗冲击性 1.2 性能参数：参数 -0.3 V to +5.5V -0.3V to (VDD + 0.3V) -55°C to +125°C -40°C to +125°C Drop from 1 metre onto a concrete surface (20000g). Powered or non-powered D/S 条件 SCA103T SCA103T Nominal –3dB LP (1 -D04 ±15 ±0.26 8-28 Vdd/2 ±0.057 -D05 ±30 ±0.5 8-28 Vdd/2 ±0.11 1024 1024 between 0…1° (2 -25…85°C (typical) -40…125°C (max) -25...85°C (typical) -40…125°C (max) Measuring range between 0…1° (2 From DC...100Hz Bandwidth 10 Hz (3 Max. Vdd = 4.75...5.25V 16 280 ±0.5 6554 ±0.002 ±0.29 ±0.013 -2.5...+1 ±0.057 8 140 ±0.5 3277 ±0.002 ±0.29 ±0.013 -2.5...+1 ±0.11 12 0.017 0.0004 0.0013 0.009 0.0004 0.0013 <0.004 <0.004 4 ±1 4 ±1 12 单位 ° g Hz V ° LSB V/g mV/° % LSB / g °/°C ° %/°C % ° Bits ° / LSB Hz /° ° % % ° 测量范围 D S 频率响应零点输出（0g时的输出） S Ratiometric output 零点校正误差数字输出零点灵敏度 S S D S 灵敏度校正误差数字输出灵敏度 D D 零点温度漂移 D 灵敏度温度漂移典型非线性数字输出分辨率 D D D D S S D 输出噪声密度模拟输出分辨率交叉轴灵敏度公制比率误差长期稳定性 (4 Note 1. 频率响应决定于传感元件内部气体的阻尼 Note 2. 输出角度与输出电压成正弦曲线关系，请参看2.2节 Note 3. 分辨率 = 噪声密度 * √(带宽) Note 4. 连续供电 (@ 23°C) 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 3/19 Rev.A

1.3 电气参数： Parameter 供电电压Vdd 电流消耗工作温度模拟输出端负载电阻模拟输出端负载电容启动延时 1.4 SPI接口的直流参数： SCA103T Series Condition Min. 4.75 Vdd = 5 V; No load Vout to Vdd or GND Vout to Vdd or GND Reset and parity check -40 10 Typ 5.0 4 Max. 5.25 5 +125 20 10 Units V mA °C kOhm nF ms Parameter Conditions Symbol Min Typ Max Unit Input terminal CSB Pull up current Input high voltage Input low voltage Hysteresis Input capacitance VIN = 0 V Input terminal MOSI, SCK Pull down current Input high voltage Input low voltage Hysteresis Input capacitance VIN = 5 V Output terminal MISO Output high voltage Output low voltage Tristate leakage 1.5 SPI接口的交流参数： I > -1mA I < 1 mA 0 < VMISO < Vdd IPU VIH VIL VHYST CIN IPD VIH VIL VHYST CIN VOH VOL ILEAK Parameter Output load SPI clock frequency Internal A/D conversion time Data transfer time Condition @500kHz @500kHz 13 4 -0.3 9 4 -0.3 Vdd- 0.5 Min. 22 2 0.23*Vdd 35 µA Vdd+0.3 V V V pF 1 17 0.23*Vdd 2 5 29 µA Vdd+0.3 V V V pF 1 0.5 100 V V pA Typ. 150 38 Max. 1 500 Units nF kHz µs µs 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 4/19 Rev.A

1.6 SPI的时序参数： Parameter Terminal CSB, SCK Time from CSB (10%) to SCK (90%) Time from SCK (10%) to CSB (90%) Terminal SCK SCK low time SCK high time Terminal MOSI, SCK Time from changing MOSI (10%, 90%) to SCK (90%). Data setup time Time from SCK (90%) to changing MOSI (10%,90%). Data hold time Terminal MISO, CSB Time from CSB (10%) to stable MISO (10%, 90%). Time from CSB (90%) to high impedance state of MISO. Terminal MISO, SCK Time from SCK (10%) to stable MISO (10%, 90%). SCA103T Series Conditions Symbol Min. Typ. Max. Unit Load capacitance at MISO < 2 nF Load capacitance at MISO < 2 nF Load capacitance at MISO < 15 pF Load capacitance at MISO < 15 pF Load capacitance at MISO < 15 pF TLS1 TLS2 TCL TCH TSET THOL TVAL1 TLZ 120 120 1 1 30 30 10 10 TVAL2 TLH TLH 15 150 ns ns µs µs ns ns 100 ns 100 ns 100 ns µs µs Terminal CSB Time between SPI cycles, CSB at high level (90%) When using SPI commands RDAX, RDAY, RWTR: Time between SPI cycles, CSB at high level (90%) CSB SCK Figure 2. MOSI MISO TLS1 TCH TCL TLS2 TLH THOL MSB in TSET DATA in TVAL1 TVAL2 MSB out DATA out Timing diagram for SPI communication LSB in LSB out TLZ 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 5/19 Rev.A

1.7 电气连接： SCA103T Series 如果SPI口不用，相关管脚 SCK (pin1), MISO (pin3), MOSI (pin4) 和 CSB (pin7)必须悬空。将逻辑 “1” (正电源电压)提供给管脚 ST_1 或 ST_2 （10脚或9脚）可激活自检测功能，两通道的自检测功能不能同时使用，如果不使用自检测功能，9脚和10脚必须悬空或接GND。倾斜信号从OUT-1和 OUT-2脚输出。 SCK SCK Ext_C_1 MISO MISO MOSI MOSI OUT_2 OUT_2 VSS GND 1 2 3 4 5 6 12 VDD VDD 11 OUT_1 OUT_1 10 ST_1/Test_in ST_1 9 8 7 ST_2 ST_2 Ext_C_2 CSB CSB Figure 3. SCA103T electrical connection No. 1 2 3 4 5 6 7 8 9 10 11 12 Node SCK NC MISO MOSI Out_2 GND CSB NC ST_2 ST_1 Out_1 VDD I/O Input Input Output Input Output Supply Input Input Input Input Output Supply 描述串行口时钟未用、保持悬空主入从出，串行数据输出主出从入，串行数据输入输出2（通道2）电源地（电源负极）片选信号输入端（低电平有效）未用、保持悬空自检测输入（通道2）自检测输入（通道1）输出1（通道1）正正电源供电（+5VDC） 1.8 典型性能特性以下章节介绍SCA103T典型的零点与灵敏度的温度特性，这些结果代表SCA103T元件典型性能。平均值、3sigma限制范围（平均±3σ标准偏移）及详细 value and 3 sigma limits (mean ± 3× standard deviation) and specification limits are presented in following diagrams. The 3 sigma limits represents 99.73% of the SCA103T population. 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 6/19 Rev.A

SCA103T 零点温度特性 (差分输出) SCA103T Series 0.3 0.2 0.1 0 -0.1 ] s e e r g e d [ r o r r e t e s f f o l a i t n e r e f f i D -0.2 -0.3 -40 -20 0 20 40 60 80 100 120 Temp [°C] Figure 4. SCA103T 典型零点温度特性 SCA103T 灵敏度（%）温度特性 (差分输出) 1.5 1 ] % 0.5 [ r o r r e y t i v i t i s n e s l a i t n e r e f f i D 0 -0.5 -1 -1.5 -2 -2.5 -3 -40 -20 0 20 40 60 80 100 120 Temp [°C] specification limit average +3 Sigma -3 Sigma specification limit specification limit average +3 Sigma -3 Sigma specification limit Figure 5. SCA103T 典型灵敏度温度特性 1.8.1 额外的外部补偿（如果需要）为取得最佳可能的精度，温度测量信息和典型的温度特性曲线可以用于补偿SCA103T的灵敏度温度特性。零点温度特性曲线没大的变化趋势，所以不需要外加零点补偿。通过使用基于平均灵敏度 additional 3rd order polynome compensation curve based on average sensitivity temperature dependency curve and temperature measurement information, it is possible to reduce sensitivity temperature dependency from 0.013%/°C down to 0.005%/°C. The equation for the fitted 3rd order polynome curve is: Scorr Where: 0000005 00005 0032 −= .0 .0 .0 T T + * 2 * 3 − * T − 031.0 Scorr: T 3rd order polynome fitted to average sensitivity temperature dependency curve temperature in °C (Refer to paragraph 2.7- Temperature Measurement) 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 7/19 Rev.A

SCA103T Series The calculated compensation curve can be used to compensate for the temperature dependency of the SCA103T sensitivity by using following equation: SENScomp Where: SENS Scorr )100 1(* + = / SENScomp SENS temperature compensated sensitivity Nominal sensitivity (16V/g SCA103T-D04, 8V/g SCA103T-D05) 1 0.8 0.6 0.4 0.2 0 ] % [ r o r r e y t i v (differential output) The temperature dependency of 3rd order compensated SCA103T sensitivity [%] The typical sensitivity temperature dependency after 3rd order compensation is shown in the figure below. Figure 6. The temperature dependency of 3rd order compensated SCA103T sensitivity compensated average +3 Sigma limit -3 Sigma limit Temp [°C] i t n e r e f f i i t i s n e s -0.8 -0.6 -0.4 -0.2 -40 -20 l a 80 -1 D 0 20 40 60 深圳市铭之光电子技术有限公司深圳 Tel:0755-83867020 香港 Tel:(852)24208555 E-mail:sales@sinocomopto.com http://www.sinocomopto.com VTI Technologies Oy www.vti.fi Subject to changes Doc.Nr. 8261700 8/19 Rev.A

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