SECS GEM 300mm半導體設備軟體標準.pdf-资料库

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# # # # $ $ $ $ ! " " ! " " ! " " ! " " Fig.1 SEMI 300mm Fig.2 2001 " Technology Roadmap# $ * + ! 9 . / > ? 1 2 5 6 8 % C D 2 e SEMI L n r Q m K SEMI E39 Object Services Standard (OSS) 2 9 http://www.secs.itri.org.tw/ 2 ! % & ’ ( ) , - 0 3 4 7 : ; < = @ A , B / : K p < ~ < L p

SEMI E40 Process Job Management (PJM) SEMI E94 Control Job Management (CJM) r } Q~ 6 eQ p 3 SEMI E39 OSS Q SEMI f b y ¡ ¢ ¥ 6ƒ £ e⁄ “ Control Job d iR Z e SEMI E40 < job u x “ Process Job «Z e l Z Q objectj SEMI E94 < ﬁ – 6, objectd i C++« Java † • ‚ e SEMI E39 „ ˝ ˛ eirˇ b K L „ Q e E39 $ eu X ‰ ¿ ˘ …† † 6 b ! v · — X K M e E40 « E94 L › Top Object Top Object eN K U L ˚ – v 7 6 n b K Q 6 X ie ¢ ﬂ r Œ L < e Fig.36 M § ? ` vd Q Ø Œ @ d ª O X ª «Z : X ª 6æ V ‚ Factory Hostl Qx Fig.3 : R jFig.3 Equipmentlƒ X Q } Q D eł ‚ jFig.3 @ e œ b Process Job SEMI E94 < ` X ª b Control Job 7 e SEMI SEMI E39 < b Top Object ª Q X } Q Œ „ Qr Fig.3 d in p R 6 Q Ø ¢ ı 7 Fig.3 • H r E40 < Œ r 6 3 9 http://www.secs.itri.org.tw/ 3 g h M < a T W X K L M S T w a y T w z Z @ § ¤ ' ' ! ‹ › ﬂ M / S £ ‡ ﬂ w z · V O < ¶ „ ” » … / ! W n ` : ´ ˆ ˜ ¯ Z ˙ ¨ 0 M a W ’ ¸ @ ! 0 a D § ˚ ’ ‰ ˇ 0 a L < „ D ` ! K a b m Æ @ X ª O Ł º ` X ª U º Z ? X $ Z d O $ Z d : : d U ˝ ¡ x a a ı S T w ? @ ª º Œ D ( ø K d ß 7 ? @ O a a › Z ` ‚ a „ O Ł ﬂ < V p U V Z , ~ n

Factory Host 1 * Note: *=0~ * 1 Equipment 1 Top Object (E39 OSS) * Control Job (E94 CJM) Process Job (E40 PJM) 1 1..* 1..* * Carrier 1 Material * Substrate Fig.3 E E39GE40 E94 H I J K B F P Class Diagram Q + ~ services6attribute „ @ X 0 D SEMI E39 < 6e SEMI K L N object › object ł + V class member datae SEMI attribute V < private service „ function6e SEMI E39 < Æ i – Top Object u 2 attribute) ObjType.) ObjID.Q set attributes.6e Table.2 d i 2 service) 2 attribute – Top Object attributes Æ i public – class member Table.1 < get attributes. – 6 ) Top Object (SEMI E39) ObjType: text ObjID: text get attributes set attributes Table.1 Top Object R attributes S services Name Definition ObjType The object type. ObjID Read Only Y The object’s identifier. Read Only Y Access Required Form Text Text Table.2 Top Object attributes T V 4 9 http://www.secs.itri.org.tw/ 4 F % L M 2 N $ % @ & O & ? ª M H d – O ‚ Z ^ ˆ † S £ ‡ ﬂ · – ˙ U < † S £ ‡ ﬂ · _ 7 Z U

e SEMI E39 Q services0 O services i E39 u Q services6 i E39 4 SEMI E40 PJS e SEMI E40 Y services6U " recipe M + 6ƒ Process Job object W attributes < - Process Job d iR ˝ Q @ Process Job ( / jwaferl6U Process Job Control Job ? ) , i V u ˙ " # v& ˝ recipe @ e‹ X Z ‚ ( Q% Fig.4 M ~ 6 A Carrier with 3 Lots controlled by one CJ A Lot with 4 Wafers controlled by one PJ A Lot with 3 Wafers controlled by one PJ A Lot with 3 Wafers controlled by one PJ , 7 ] Carrier j Process Job S Control Job 3 ] ; ] 3 ] Process Jobs n " wafer# 7 ]^ e f g h i ! @ 3 ] Process Jobs k 2 m q Fig.4 E b LotsH Control Job k e 300mm & O : e . ; . 0 D 4 / jwaferl [ i. < 1 = 6 ~ . ; jCarrierl Lot Æ Control Job d x 6[ i ? eN Lot ‚ recipe ˝ 6r Process Job @ ‹ > „ N Lot [ Process Job M Lot › ? eiÆ . ; ƒ C X ^ j› iÆ . ; lƒ E — Lot Process Job Control Job ) 6 Process Job Table.36 ! attributes services E • Q Process Job Object (SEMI E40) ObjType=”PROCESSJOB”: Text ObjID: Text 5 9 http://www.secs.itri.org.tw/ 5 – u – ‚ ! D s ! ˚ ’ – H Z – X , S T w x a y T U $ % & ’ ( ) * R S T w ‡ % W ˆ „ Æ % & ‡ ˝ - . ] 7 8 0 ł ) 1 2 E F F W X Y Z [ \ * _ ‘ a c 2 3 d & A : I i l F 7 o ; i p ’ ˙ 2 < D 3 5 „ Z M & ’ 6 7 8 9 / / § Æ & ‡ M & ’ § Æ $ ^ : ˙ , „ Z / $ O g > ł % & ’ / ] A B Z ! / @ d / ! O ‡ D / @ [ M ( E F F G

PauseEvent: List PRJobStateList (PRJobState X 3): List PRMtlNameList (list of PRMtlName): List PRMtlType: Enumerated PRProcessStart: Boolean PRRecipeMethod: Enumerated RecID: Text RecVariableList: List PRGetAllJobs PRGetSpace PRJobAlert PRJobCommand PRJobCreate PRJobCreateEnh PRJobDequeue PRJobDuplicateCreate PRJobEvent PRJobMultiCreate PRJobSetRecipeVariable PRJobSetStartMethod PRSetMtrlOrder Top Object attributes S services = v 7 ] , Process : attributes S services V QI / Q Process Job J - servicesu Process Process Job K r Process Job eM L r ‡ { State Machine 9 Table.3 r Job Object x R Job ( — d i Z d i Process Job ( h e local A QY Process Job — > „ Process Job M «U > X M N Process Job W % Process Job $ Z attribute ˆ œ service H J X v‘ % $ c service H J X v‘ % $ Z iR f Y R — 7 w h i Q R — k l Process Job6m Z 7 Z R — Q% f Process Job ( _ 6Q˛ W X ( r e Table.4 - % SEMI E5 SECS-II • G 6 6 9 http://www.secs.itri.org.tw/ 6 s t u e V w d S T w U < , ) H _ $ H M % N % ¡ O P Q Y x a R O S % T ˙ V W Y 8 [ \ X ˜ ] P M O ^ 8 _ a M ] P M w § b _ a M ) H _ Z d S T w e x n g Z B j „ Y x h x e f ˛ ˝ ‚ ˝ ¡ R D O H G n / 7 8 9 ‚ ˝ ¡ o ( M h x R S T w e ) H k R S T < p ˜ K L M ) ˜

S16F19/20 PRGetAllJobs S16F21/22 PRGetSpace S16F7/8 PRJobAlert PRJobCommand S16F5/6 S16F3/4 PRJobCreate S16F11/12 PRJobCreateEnh S16F17/18 PRJobDequeue S16F13/14 PRJobDuplicateCreate S16F9/10 S16F15/16 PRJobMultiCreate S16F23/24 PRJobSetRecipeVariable S16F25/26 PRJobSetStartMethod S14F3/4 PRSetMtrlOrder PRJobEvent Table.4 z e 8 Process Job 5 SEMI E94 CJS d i Process Job U V e SEMI E94 < – Control Job M r ª Process Jobs _ M — ( : ) 6e Fig.3 r X r Control Job Q( Job s Q Process Job d : Process JobZ i u : X ª m Control Job „ Control ? ev M % K Q¶ 6 • Control Job Q l Deletejw of queue.{ ru G 6Control Job y lx | M r} ? ’ % Control Job6 / Queue & attributes services c services r e Table.5 n Createj q service „ head ~ e Control Job Queue Control Job ) HOQ. Ø 7 Control Job „ Control Job Object (SEMI E94) CarrierInputSpec: List CurrentPRJob: List DataCollectionPlan: Text MtrlOutByStatus: List MtrlOutSpec: List ObjID: Text ObjType=”ControlJob”: Text PauseEvent: List ProcessingCtrlSpec: List 7 9 http://www.secs.itri.org.tw/ 7 y { | } o ~ / 6 k p q 3 7 W & $ „ Z ! q X ‘ ı ? @ ª – m D Œ œ ) d Z t H O U – < < b ‰ z ! Z Z ) $ Z % * k @ M ” ˙ M

ProcessingOrderMgmt: Enumerated StartMethod: Boolean State: Enumerated Abort Cancel Create Delete Deselect HOQ Pause Resume Start Stop Top Object attributes S services = v 7 ] , Control : attributes S services V Control Job J QI / Q - servicesu Control c Control Job < c Q Status Variablesjw - 10 servicesj QueuedCJobs QueueAvailableSpace Table.5l œ l Table.5 r Job Object x R Job ( v Process Job ( Y R — Q[ @ Control Job ( iR ‚ R — h i j e local ( e Table.6 K SECS-II ˜ % x Q x 6 Table.6 Request CJ Queue space Request List of CJs in the Queue S14F9/10 Create CJ S1F3/4 S1F3/4 S14F11/12 Delete CJ S16F27/28 CJ Command Event Report S6F11/12 z e Control Job 8 6 d iR T w V < Process Job v Control Job 8 9 http://www.secs.itri.org.tw/ 8 s t u e V w d S T w U < , ) H _ $ H b , G b e f 9 ) H _ ) H _ Z d S T w e f x e f e f h [ R S T ˝ ¡ L o ( M h y { | } o ~ / 6 k p q 3 7 S T w e f x a y z i j U

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