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MMIC设计经典教材.pdf

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    Practical MMIC Design
    Contents vii
    Foreword
    Preface xv
    1 Introduction 1
    1.1 Introduction to MMICs 2
    1.2 The History of MMICs 3
    1.3 The MMIC Advantage 6
    1.4 Basic Design Process 7
    References 8
    2 Component Technology and Foundry Choice 11
    2.1 Active Components 12
    2.2 Passive Components 31
    2.3 Questions 50
    References 52
    3 Foundry Use and Economics 57
    3.1 Using a Foundry 57
    3.2 Economics 61
    References 64
    4 Simulation and Component Models 65
    4.1 Simulation 66
    4.2 Passive Component Models 76
    4.3 Active Component Models 82
    4.4 Questions 84
    References 85
    5 Design 89
    5.1 Impedance Matching and the Smith Chart 90
    5.2 Passive Elements 108
    5.3 Amplifiers 125
    5.4 Oscillators 188
    5.5 Mixers 194
    5.7 Phase Shifters 210
    5.8 Switched-Path Attenuators 213
    5.9 Circuits with Digital Application 214
    5.10 Millimeter-Wave Circuits 216
    5.11 Yield Improvement 231
    5.12 Questions 246
    References 250
    6 Layout 261
    6.1 Layout Files 262
    6.2 Circuit Layout Process 264
    6.3 Layout Checking 267
    6.4 Chip Arraying 270
    6.5 Mask Manufacture 274
    6.7 Questions 277
    References 277
    7 Processing Technology 279
    7.1 Substrate Material Growth 280
    7.2 Wafer Production 283
    7.3 Surface Layers 283
    7.4 Photolithography 285
    7.5 Wafer Thinning 302
    7.6 Through-Substrate Vias 304
    7.7 Back-Face Metal 305
    7.8 Chip Separation 306
    7.9 Quality Assurance 306
    7.10 Questions 308
    References 309
    8 Test 313
    8.1 Process Control and Monitoring (PCM) 313
    8.2 The dc Test and Stability Problems 314
    8.3 RF Testing and Calibration 315
    8.4 Questions 319
    References 320
    Appendix: Answers to Questions 323
    Chapter 2 323
    Chapter 4 324
    Chapter 5 325
    Chapter 6 328
    Chapter 7 329
    Chapter 8 330
    Glossary 331
    About the Author 341
    Index 343
    Practical MMIC Design
    For a complete listing of the Artech House Microwave Library, turn to the back of this book.
    Practical MMIC Design Steve Marsh a r t e c h h o u s e . c o m
    Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the U.S. Library of Congress. British Library Cataloguing in Publication Data A catalogue record for this book is available from the British Library. ISBN-10: 1-59693-036-5 ISBN-13: 978-1-59693-036-0 Cover design by Yekaterina Ratner © 2006 ARTECH HOUSE, INC. 685 Canton Street Norwood, MA 02062 All rights reserved. Printed and bound in the United States of America. No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, in- cluding photocopying, recording, or by any information storage and retrieval system, with- out permission in writing from the publisher. All terms mentioned in this book that are known to be trademarks or service marks have been appropriately capitalized. Artech House cannot attest to the accuracy of this informa- tion. Use of a term in this book should not be regarded as affecting the validity of any trade- mark or service mark. 10 9 8 7 6 5 4 3 2 1
    For my family, wife Sue, and sons Sam, Jon, and Toby
    Contents Foreword Preface Introduction Introduction to MMICs The History of MMICs The MMIC Advantage Basic Design Process References Component Technology and Foundry Choice Active Components Substrate Material Transistor Type Transistor Response Versus Frequency Passive Components Diodes Transmission Lines vii 1 1.1 1.2 1.3 1.4 2 2.1 2.1.1 2.1.2 2.1.3 2.2 2.2.1 2.2.2 xiii xv 1 2 3 6 7 8 11 12 12 14 30 31 31 31
    viii Practical MMIC Design Resistors Capacitors Inductors 2.2.3 2.2.4 2.2.5 2.2.6 Metal Layer Interconnects 2.2.7 2.2.8 Bond-pads Substrate Vias 2.3 Questions References 3 Foundry Use and Economics Using a Foundry Agreements and Discussions Delivery of Design Data Circuit Design Design Review 3.1 3.1.1 3.1.2 3.1.3 3.1.4 3.1.5 Wafer Fabrication 3.1.6 Test and Delivery Economics 3.2 3.2.1 MMIC Production Costs 3.2.2 Defect Densities References 4 Simulation and Component Models Simulation The s-parameters Component Characterization 4.1 4.1.1 4.1.2 4.1.3 Model Development 4.1.4 4.1.5 4.1.6 Linear Simulation Nonlinear Simulation 2D, 2.5D, and 3D Electromagnetic Simulation 4.2 4.2.1 4.2.2 Passive Component Models Capacitors Inductors 42 44 46 49 49 50 50 52 57 57 57 59 59 60 60 61 61 61 62 64 65 66 66 69 71 74 74 75 76 76 77
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