ZYGO干涉仪说明手册.pdf

发布时间：2022-06-07 发布人：admin 分类：说明书资料大小：4.95M 资料格式：pdf 举报版权申诉

mlm6701-7613537-4744300845398799753.pdf-第1页.png

第1页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第2页.png

第2页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第3页.png

第3页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第4页.png

第4页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第5页.png

第5页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第6页.png

第6页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第7页.png

第7页 / 共498页

mlm6701-7613537-4744300845398799753.pdf-第8页.png

第8页 / 共498页

MetroPro Reference Guide

Customer Support

Manual Revision

Software License

Contents (clickable)

1 MetroPro Basics

2 Working With Applications

3 Controls and Buttons

4 Instrument Control

5 Mask Editor

6 Pattern Editor

7 Filled Plot and Profile Plot

8 Other Plots

9 Results and Attributes

10 Special Results

11 Special Functions

12 Data Format and Conversion

App A Error Messages

App B ActiveX MetroPro DLL

App C Command Line Options

App D MetroPro Applications

INDEX (clickable)

MetroPro Reference Guide OMP-0347J Zygo Corporation Laurel Brook Road P.O. Box 448 Middlefield, Connecticut 06455-0448 Telephone: (860) 347-8506 Fax: (860) 347-8372 E Mail: inquire@zygo.com Website: www.zygo.com 3 4 5 1 2 MetroPro Basics Working With Applications Controls and Buttons Instrument Control Mask Editor Pattern Editor Filled Plot and Profile Plot Other Plots Results and Attributes Special Results Special Functions Data Format and Conversion 12 10 11 6 INDEX 7 8 9

INTERNET WRITE www.zygo.com support@zygo.com Zygo Corporation Laurel Brook Road P.O. Box 448 Middlefield, CT 06455-0448 Attn: Customer Support ZYGO CUSTOMER SUPPORT For help within North America, please use the contacts listed below. For help in other countries, please contact your local Zygo Corporation representative. Be sure to supply the instrument model and serial number, and the software version. Customer Support PHONE FAX Monday - Friday, 8 a.m. - 8 p.m. (Eastern Standard Time) (800) ZYGO NOW (800) 994-6669 or (860) 704-5191 (860) 346-4188 MANUAL REVISION INFORMATION Revision Date Software Version A B C D E May 1993 March 1995 April 1997 April 1998 April 2001 4.0.0 6.0.10 7.1.5 7.2.2 7.4.2 Revision Date F G H J October 2001 October 2002 January 2004 August 2004 Software Version 7.6.1 7.10.0 7.15.0 8.0.1 MANUAL NOTATIONS Warning! Denotes a hazard that could cause injury to personnel, and can also cause damage to the equipment. Note provides helpful information. PAPERLESS MANUALS IN PDF: Many of Zygo Corporation’s manuals are available in Adobe Acrobat Reader format (PDF) for on-screen viewing. PDF manuals are available on CD or visit www.zygo.com. NOTICE: The descriptions, drawings, and specifications contained herein are subject to change. Zygo Corporation is not responsible for errors or omissions herein or for incidental damages in connection with the furnishing or use of this information. This document shall not be reproduced, photocopied, or duplicated, in whole or in part, without prior written approval. © Copyright 2004 by Zygo Corporation; All Rights Reserved. • Product or company names mentioned in this manual are trademarks or registered trademarks of their respective companies, and are hereby acknowledged. i

Software License ZYGO Software License Agreement The following is a legal agreement between you and ZYGO Corporation. This software is licensed to you and not sold. You may use this software only according to the terms of this License. 1. GRANT OF LICENSE. You may use the software only on a single computer at a time. You may not network the software or otherwise use it on more than one computer or computer terminal at the same time. The License covers all users on the single system. 2. OWNERSHIP OF SOFTWARE. The software is owned by ZYGO and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the software like any other copyrighted material. 3. USE RESTRICTIONS. You may transfer the software to a hard disk and make copies of the software solely for backup or archival purposes. You may not alter, modify, or adapt any part of the software or documentation. This means you may not reverse-engineer, decompile, disassemble this software, or create derivative works from it. 4. TRANSFER RESTRICTIONS. This Software is licensed only to you, and may not be transferred to anyone without prior written consent of ZYGO. The terms and conditions of this Agreement shall bind any authorized transferee of software. In no event may you transfer, assign, rent, lease, sell, or otherwise dispose of the software on a temporary or permanent basis except as expressly provided herein. 5. TERMINATION. This License is effective until terminated. This License will terminate automatically without notice from ZYGO if you fail to comply with any provision of this License. Upon termination you shall destroy the written materials and all copies of the software, including modified copies, if any. Disclaimer of Warranty on Software THE SOFTWARE IS PROVIDED “AS IS” WITHOUT WARRANTY OF ANY KIND, AND ZYGO EXPRESSLY DISCLAIMS ALL IMPLIED WARRANTIES. ZYGO DOES NOT WARRANT, GUARANTEE, OR MAKE ANY REPRESENTATIONS REGARDING THE USE OF OR THE RESULTS OF THE USE OF THE SOFTWARE OR ANY ACCOMPANYING WRITTEN MATERIALS IN TERMS OF THEIR CORRECTNESS, ACCURACY, RELIABILITY, CURRENTNESS, OR OTHERWISE. THE ENTIRE RISK AS TO THE RESULTS AND PERFORMANCE OF THE SOFTWARE AND WRITTEN MATERIALS IS ASSUMED BY YOU. Software Limited Warranty ZYGO warrants the magnetic media on which the software is recorded to be free from defects in materials and faulty workmanship under normal use for a period of 90 days from the date of delivery. ZYGO will replace the media, provided you return the faulty media to ZYGO with return authorization. ZYGO shall have no responsibility to replace magnetic media damaged by accident, abuse, or misapplication. Limitation of Liability IN NO EVENT SHALL ZYGO, OR ITS EMPLOYEES AND AFFILIATES BE LIABLE TO YOU FOR ANY CONSEQUENTIAL, INCIDENTAL, OR DIRECT DAMAGES ARISING OUT OF THE USE OR THE INABILITY TO USE THE SOFTWARE OR ACCOMPANYING WRITTEN MATERIALS, EVEN IF ZYGO OR A ZYGO REPRESENTATIVE HAS BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES. THIS LIMITED WARRANTY GIVES YOU SPECIFIC LEGAL RIGHTS. YOU MAY HAVE OTHERS, WHICH VARY FROM STATE TO STATE. U.S. Government Restricted Rights The software and documentation are provided with restricted rights. Use, duplication, or disclosure by the Government is subject to restrictions as set forth in subparagraph (c)(1)(ii) of the Rights in Technical Data and Computer Software clause at 52.227-7013. Contractor/manufacturer is Zygo Corporation, Laurel Brook Road, Middlefield, CT 06455. Should you have any questions concerning this Agreement, or if you wish to contact ZYGO for any reason, please write: ZYGO Service Department, Laurel Brook Road, P.O. Box 448, Middlefield, CT 06455-0448. 11/2002 ii

SECTION 1 – METROPRO BASICS CONTENTS MetroPro Manuals.......................................................................................... 1-1 MetroPro Software ......................................................................................... 1-1 The Structure of MetroPro ............................................................................ 1-2 Finding Out What an Item Is.......................................................................... 1-4 Using the Keyboard........................................................................................ 1-4 Entering Text and Numbers..................................................................... 1-4 Special Keys ............................................................................................ 1-5 Key Combinations ................................................................................... 1-5 Function Keys.......................................................................................... 1-5 Light Level Keys ..................................................................................... 1-6 Working With Menus..................................................................................... 1-6 Accessing a Menu.................................................................................... 1-6 Selecting a Command .............................................................................. 1-7 Selecting a Sub-menu .............................................................................. 1-7 Using Sticky-menus................................................................................. 1-8 Creating a Sticky-menu ........................................................................... 1-8 Selecting a Sticky-menu Command......................................................... 1-8 Moving a Sticky-menu............................................................................. 1-8 Removing a Sticky-menu......................................................................... 1-8 Typical Menus ......................................................................................... 1-9 Working With Windows ................................................................................ 1-11 Parts of a Window.................................................................................... 1-11 Creating a New Window.......................................................................... 1-12 Moving a Window ................................................................................... 1-12 Closing a Window ................................................................................... 1-13 Closing a Window for the First Time ...................................................... 1-13 Opening a Window .................................................................................. 1-13 Resizing a Window.................................................................................. 1-13 Printing a Window................................................................................... 1-14 Layering Windows................................................................................... 1-14 Using the Window Control Command .................................................... 1-14 Deleting a Window .................................................................................. 1-14 Working With Plots ................................................................................. 1-15 Working With Boxes and Buttons.................................................................. 1-16 What is a Box?......................................................................................... 1-16 Parts of a Box........................................................................................... 1-16 Using Boxes............................................................................................. 1-16 Creating a New Box................................................................................. 1-17 Modifying a Box...................................................................................... 1-17 What is a Button?..................................................................................... 1-18 Creating a New Button ............................................................................ 1-18 Modifying a Button.................................................................................. 1-18 Deleting a Box or Button......................................................................... 1-18 What is a Dialog Box............................................................................... 1-19 Responding to a Dialog Box.................................................................... 1-19 iii

CONTENTS SECTION 1 – METROPRO BASICS (continued) Working With MetroPro Files........................................................................ 1-20 Using the File Handler............................................................................. 1-21 Naming Files............................................................................................ 1-22 Saving Files ............................................................................................. 1-23 Loading Files ........................................................................................... 1-23 Removing Files........................................................................................ 1-24 Using the File Handler Directory Function ............................................. 1-25 The Directory Dialog Box ....................................................................... 1-25 Selecting Drives....................................................................................... 1-26 Creating New Directories ........................................................................ 1-26 Working With Directories ....................................................................... 1-26 Printing Results .............................................................................................. 1-27 Output Options......................................................................................... 1-27 The Print Panel ........................................................................................ 1-27 Printing Screens to a Printer .................................................................... 1-27 Printing the Contents of a Window.......................................................... 1-28 Printing Screens to Disk in Graphic Formats .......................................... 1-28 Printing Measurement Data as Text......................................................... 1-28 The Print Panel Options........................................................................... 1-29 Printing Example- Profile Data................................................................ 1-30 Exporting Information from MetroPro........................................................... 1-31 Using a Touchscreen ...................................................................................... 1-31 The Screen Keyboard............................................................................... 1-31 Using the Touchscreen with Controls...................................................... 1-32 Using the Touchscreen with Windows .................................................... 1-32 SECTION 2 – WORKING WITH APPLICATIONS What is An Application ? ............................................................................... 2-1 Why Are Applications Useful.................................................................. 2-1 Understanding Applications........................................................................... 2-2 Learning to Use Applications .................................................................. 2-2 Types of MetroPro Applications .................................................................... 2-2 Loading Applications ..................................................................................... 2-3 Opening Applications..................................................................................... 2-4 The Common Parts of Applications ............................................................... 2-5 Buttons..................................................................................................... 2-6 Controls and Attributes............................................................................ 2-7 Miscellaneous Windows.......................................................................... 2-8 Making New Applications.............................................................................. 2-9 Building an Application........................................................................... 2-9 Modifying an Existing Application ......................................................... 2-9 Using the Grid Controls........................................................................... 2-10 Saving Applications ....................................................................................... 2-11 Re-saving Applications............................................................................ 2-11 Updating Old Applications............................................................................. 2-12 Deleting an Application.................................................................................. 2-12 iv

CONTENTS SECTION 2 – WORKING WITH APPLICATIONS (continued) Saving Application Configurations................................................................ 2-12 Using Settings Files........................................................................................ 2-13 Locking an Application.................................................................................. 2-14 Unlocking an Application........................................................................ 2-14 MetroPro Processing Flow ............................................................................. 2-15 Understanding Data Windows........................................................................ 2-16 SECTION 3 - CONTROLS AND BUTTONS Buttons ........................................................................................................... 3-1 Controls .......................................................................................................... 3-2 Saving Control Settings ........................................................................... 3-3 Control Settings and Their Interaction..................................................... 3-3 Controls listed alphabetically, or see Index. SECTION 4 – INSTRUMENT CONTROL This Section Includes ..................................................................................... 4-1 Auto Focus ..................................................................................................... 4-2 Overview of Auto Focus.......................................................................... 4-2 Using Auto Focus .................................................................................... 4-2 Example of Auto Focus Controls and the Scan Focus Windows ........... 4-3 Auto Focus Setup..................................................................................... 4-3 Auto Null........................................................................................................ 4-4 Overview of Auto Null ............................................................................ 4-4 Using Auto Null....................................................................................... 4-4 Auto Null Setup ....................................................................................... 4-4 Auto Sequence Function ................................................................................ 4-5 Auto Sequence Controls .......................................................................... 4-5 Auto Tilt ......................................................................................................... 4-6 Overview of Auto Tilt.............................................................................. 4-6 Using Auto Focus .................................................................................... 4-6 Auto Tilt Setup ........................................................................................ 4-6 Averaging....................................................................................................... 4-7 Averaging Controls.................................................................................. 4-8 Error Removal ............................................................................................... 4-8 Static Method of Creating a System Error File........................................ 4-9 Step and Measure Method of Creating a System Error File .................... 4-10 Naming System Error Files...................................................................... 4-11 Using System Error Data Files ................................................................ 4-11 Naming Convention for MetroPro Generated Error Files ....................... 4-12 FlashPhase...................................................................................................... 4-12 Overview of FlashPhase .......................................................................... 4-12 Using FlashPhase..................................................................................... 4-13 FlashPhase Controls................................................................................. 4-14 Obtaining Maximum Accuracy with FlashPhase..................................... 4-16 v

CONTENTS SECTION 4 – INSTRUMENT CONTROL (continued) Lateral Calibration.......................................................................................... 4-16 Why Calibrate.......................................................................................... 4-16 Lateral Calibrator – GPI, VeriFire, MicroLUPI, MESA, DVD-400.............. 4-17 Lateral Calibrator Description ................................................................. 4-17 Plano Calibration Procedure .................................................................... 4-18 Spherical Distortion Correction ............................................................... 4-19 Lateral Calibrator – Microscopes ................................................................... 4-21 Microscope Lateral Calibrator Description ............................................. 4-22 Designating Objectives............................................................................ 4-22 Creating TRC (Turret Reference Coordinates)........................................ 4-23 Standard Microscope Calibration Procedure ........................................... 4-24 Calibration Procedure when Image Zoom is Free ................................... 4-25 Automatic Microscope Lateral Calibration Procedure ............................ 4-26 Troubleshooting Automatic Calibration .................................................. 4-29 Using the Enter Cal command ................................................................. 4-29 Remastering Objectives ........................................................................... 4-29 Light Level Control........................................................................................ 4-30 The Light Level Dialog............................................................................ 4-30 The Light Level Keys .............................................................................. 4-30 Live Display Window .................................................................................... 4-31 Moving the Live Display ......................................................................... 4-31 Resizing the Live Display........................................................................ 4-31 Printing the Live Display......................................................................... 4-31 Micro LYNX Window ................................................................................... 4-32 Video Monitor Output.................................................................................... 4-33 The Video Monitor Window.................................................................... 4-33 Creating a Video Monitor Window ......................................................... 4-34 SECTION 5 –MASK EDITOR Masks ............................................................................................................. 5-1 What is a Mask? ............................................................................................. 5-1 The Mask Editor Window .............................................................................. 5-2 The Four Masks of MetroPro................................................................... 5-3 The Mask Editor Buttons......................................................................... 5-4 Creating a Circle, Square, Ellipse, or Rectangle Figure .......................... 5-5 Creating a Polygon Figure ....................................................................... 5-5 Creating a Curve Figure........................................................................... 5-5 Picking or Selecting Figures.................................................................... 5-5 Moving Figures........................................................................................ 5-5 Copying Figures....................................................................................... 5-6 Resizing or Adjusting Figures ................................................................. 5-6 Rotating Figures....................................................................................... 5-6 Filling and Unfilling Figures ................................................................... 5-6 Deleting Figures....................................................................................... 5-6 vi

分享到：

赞收藏

资料库

ZYGO干涉仪说明手册.pdf

相关推荐

操作系统

热门标签

最新资料