离子注入机--相关参数，使用说明等.pdf

发布时间：2022-06-05 发布人：admin 分类：说明书资料大小：1.74M 资料格式：pdf 举报版权申诉

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Exceed400HY A Proton implanter for VCSEL Nissin Ion Equipment Co., Ltd. April 14th 2017 F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 1

Applications of VCSEL • DEPTH CAMERAS – 3D imaging – Navigation in building – Virtual reality • INFRARED ILLUMINATION – Security, driving assistant at night and fog • LIDARs – Anti-collision – Self-driving cars • Other applications F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 2

3D camera used for Smartphone by Lenovo Munich, Germany, and San Francisco, CA, USA – June 9, 2016 – Lenovo is the first manufacturer worldwide to bring Tango technology to a consumer product. Google's technology that allows devices to understand spatial information is an exclusive feature in the PHAB2 Pro smartphone launched today. (http://www.opli.net/opli_magazine/imaging/2016/smallest-3d-camera- worldwide-brings-augmented-reality-to-a-smartphone-nov-news/) Lenovo’s new PHAB2 Pro smartphone (Photo: Lenovo) ＊Time of Flight (ToF) technology. ＊Proton implant, better for refinement and device miniaturization. F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 3

LIDARs for Self-Driving LIDAR: Laser Imaging detection and Ranging ＊A 3D laser Radar using VCSEL. ＊Proton implant for VCSEL, better for high power and high switching speed. 2017/04武漢匡老师摄） F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 4

Examples of Proton implant for VCSEL1 • λ:1850 nm • Proton implant – Gain guide implant (current aperture) – Isolation implant Vixar Inc. F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 5

Examples of Proton implant for VCSEL2 • High power: 40.6W (100 μm x 7 array, peak output at 20degC) – High power density: 73.8 kW/cm2 (3 times larger than that of oxide- confined VCSELs) • Large current aperture (100 μm) (2013 SPIE Newsroom 10.1117/2.1201302.004722 浜松光電子) F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 6

Proton implanter for VCSEL 3,600mm(W) ×7,438mm(L) × 3,280mm(H) Paint color: BY-371-233 (white) F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 7

Configuration of Exceed400HY ACC FEM BSM E/S Chamber SAM Collimator A field proven stable beam line for mass production. F-2016-PDN-0051325R0 NISSIN Confidential NISSIN Confidential 8

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