倾角传感器SCA100T详细说明文档.pdf-资料库

VTI 科技 SCA100T 丛书 SCA100T 双重的轴倾角罗盘系列 THE SCA100T DUAL AXIS INCLINOMETER SERIES The SCA100T Series is a 3D-MEMS-based dual axis inclinometer family that provides instrumentation grade performance for leveling applications. The measuring axes of the sensing elements are parallel to the mounting plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with robust sensing element design, make the SCA100T the ideal choice for leveling instruments. The VTI inclinometers are insensitive to vibration, due to their over damped sensing elements, and can withstand mechanical shocks of up to 20000 g. 特征 Features • Dual axis inclination measurement (X and Y) • Measuring ranges ±30° SCA100T-D01 and± 90° SCA100T-D02 • 0.0025° resolution (10 Hz BW, 模拟输出) • Sensing element controlled over damped frequency response (-3dB 18Hz) • Robust design, high shock durability (20000g) • High stability over temperature and time • Single +5 V supply • Ratiometric analog voltage outputs 应用Applications • SPI角度和温度输出Digital SPI inclination and temperature output • 多种失败检测功能Comprehensive failure detection features o True self test by deflecting the sensing elements’ proof mass by electrostatic force. o Continuous sensing element interconnection failure check. o Continuous memory parity check. • RoHS compliant • Compatible with Pb-free reflow solder process •平台调平和稳定Platform leveling and stabilization • 360°垂直定向测量360° vertical orientation measurement • 仪器调平Leveling instruments •构造层次Construction levels Figure 1. Functional block diagram 功能方框图 1 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 1. 电器特性 Electrical Specifications 科技 SCA100T 丛书 The SCA100T product family comprises two versions, the SCA100T-D01 and the SCA100T-D02 that differ in measurement range. The product version specific performance specifications are listed in the table SCA100T performance characteristics below. All other specifications are common with both versions. Vdd=5.00V and ambient temperature unless otherwise specified. 1.1 绝对的最大等级 Absolute Maximum Ratings Supply voltage (VDD) VDD电压 Voltage at input / output pins I/O引脚电压 -0.3V to (VDD + 0.3V) Storage temperature 保存温度 Operating temperature 操作温度 Mechanical shock 机械冲击 -0.3V to+5.5V -55°C to +125°C -40°C to +125°C Drop from 1 meter onto a concrete surface (20000g). Powered or non-powered 1.2 特征参数 Performance Characteristics Parameter 测量范围Measuring range 响应频率(带宽)Frequency response 0g偏移量模拟输出Offset (Output at 0g) 偏移量校准误差Offset calibration error 0g偏移量数字输出Offset Digital Output 模拟量输出灵敏度Sensitivity Condition 标称Nominal –3dB LP(1 Ratiometric output 在0--1°时(2 灵敏度校准误差Sensitivity calibration error 数字量输出灵敏度Sensitivity Digital Output Offset temperature dependency 温度引起的角度偏移 Sensitivity temperature dependency 温度引起的灵敏度偏移典型的非直线性Typical non-linearity 数字输出协议Digital output resolution 输出噪音密度Output noise density 模拟量输出分辨率Analog output resolution 公制误差比率Ratiometric error 正交敏感Cross-axis sensitivity 长期稳定性Long term Stability (4 -25…85°C (typical) -40…125°C (max) -25...85°C (typical) -40…125°C (max) 满量程Measuring range 在0--1°时(2 From DC...100Hz Bandwidth 10 Hz (3 Vdd = 4.75...5.25V Max SCA100T-D01 SCA100T-D02 Units ±30 ±0.5 8-28 Vdd/2 ±0.11 1024 4 70 ±0.5 1638 ±0.008 ±0.86 ±0.014 -2.5...+1 ±0.11 11 0.035 0.0008 0.0025 ±1 4 <0.014 ±90 ±1.0 8-28 Vdd/2 ±0.23 1024 2 35 ±0.5 819 ±0.008 ±0.86 ±0.014 -2.5...+1 ±0.57 11 0.07 0.0008 0.0025 ±1 4 <0.014 ° g Hz V ° LSB V/g mV/° % LSB / g °/°C ° %/°C % ° Bits ° / LSB ° / ° % % ° Note 1. 响应频率由内部敏感元件的气阻尼决定The frequency response is determined by the sensing element’s internal gas damping. Note 2. The angle output has SIN curve relationship to voltage output refer to paragraph Error! Reference source not found. Note 3. Resolution = Noise density * √(bandwidth) Note 4. Power continuously connected (@ 23°C). 2 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 科技 SCA100T 丛书 1.3 电气特性 Electrical Characteristics Parameter参数 Condition条件 Supply voltage Vdd 输入电压 Current consumption消耗电流 Operating temperature操作温度 Analog resistive output load 模拟量稳定输出负载 Analog capacitive output load 模拟端电容 Start-up delay 启动延迟 Vdd = 5 V; 无负载 Vout to Vdd or GND Vout to Vdd or GND Reset and parity check Min. 4.75 -40 10 Typ 5.0 4 Max. 5.25 5 +125 20 10 Units V mA °C KOhm K欧姆 nF ms 1.4 SPI 接口的直流特性 SPI Interface DC Characteristics Parameter Conditions Symbol Min Typ Max Unit Input terminal CSB CSB输入端 Pull up current上拉电流 Input high voltage 输入高电平 Input low voltage 输入低电平 Hysteresis滞后现象 Input capacitance输入电容 VIN = 0 V IPU VIH VIL VHYST CIN Input terminal MOSI, SCK Pull down current 拉低电流 Input high voltage输入高电平 Input low voltage输入低电平 Hysteresis滞后作用 Input capacitance输入电容 VIN = 5 V IPD VIH VIL VHYST CIN Output terminal MISO 13 4 -0.3 9 4 -0.3 Output high voltage输出高电平 Output low voltage输出低电平 Tristate leakage三态泄露 I > -1mA I < 1 mA 0 < VMISO

VTI 科技 SCA100T 丛书 1.6 SPI 接口时序 SPI Interface Timing Specifications Parameter Conditions Symbol Min. Max. Unit Terminal CSB, SCK输入端CSB、SCK Load capacitance at MISO < 2 nF负荷容量MISO<2 nF Load capacitance at MISO < 2 nF Terminal MOSI, SCK Terminal MISO, CSB Load capacitance at MISO < 15 pF Load capacitance at MISO < 15 pF Load capacitance at MISO < 15 pF Time from CSB (10%)to SCK (90%)从CSB计时(10%)到SCK(90%) Time from SCK (10%)to CSB (90%)从SCK计时(10%)到CSB(90%) Terminal SCKSCK端 SCK low time SCK低电平时间 SCK high time SCK高电平时间 Time from changing MOSI(10%, 90%) to SCK (90%).Data setup time 时间从变更 MOSI(10%,90%) 到 SCK(90%).数据装备时间 Time from SCK (90%) to changing MOSI (10%,90%).Data hold time计时从SCK(90%)到变更 MOSI。(10%,90%)数据把握时间 Time from CSB (10%) to stable MISO (10%, 90%). Time from CSB (90%) to high impedance state of MISO. Terminal MISO, SCK Time from SCK (10%) to stable MISO (10%, 90%). Terminal CSB Time between SPI cycles, CSB at high level (90%)在SPI两字节之间的时间间隔,CSB高电平(90%) When using SPI commands RDAX, RDAY, RWTR: Time between SPI cycles, CSB at high level (90%)当使用 SPI 指令RDAX, RDAY,RWTR的时候: 在SPI两字节之间的时间间隔,CSB高电平(90%) TLS1 TLS2 TCL TCH TSET THOL TVAL1 TLZ TVAL2 TLH 120 120 1 1 30 30 10 10 15 TLH 150 100 100 100 ns ns µs µs ns ns ns ns ns µs µs Figure 2. Timing diagram for SPI communicationSPI 数据通信时间图 4 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 科技 SCA100T 丛书 1.7 引脚配置 Electrical Connection If the SPI interface is not used SCK (pin1), MISO (pin3), MOSI (pin4) and CSB (pin7) must be left floating. Self-test can be activated applying logic “1” (positive supply voltage level) to ST_1 or ST_2 pins (pins 10 or 9). Self-test must not be activated for both channels at the same time. If ST feature is not used pins 9 and 10 must be left floating or connected to GND. Inclination signals are provided from pins OUT_1 and OUT_2. Figure 3. SCA100T electrical connection 1.8 典型工作特性 Typical Performance Characteristics Typical offset and sensitivity temperature dependencies of the SCA100T are presented in following diagrams. These results represent the typical performance of SCA100T components. The mean value and 3 sigma limits (mean ± 3× standard deviation) and specification limits are presented in following diagrams. The 3 sigma limits represents 99.73% of the SCA100T population. SCA100T典型偏移形式在下列的图表中被呈现，这些结果表现SCA100T的典型数据，平均值和3(中间数± 3×标准偏差)个限度的规格在下列的图表中示出，3 sigma限度代表了 SCA100T 99.73% 的比率。 5 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 科技 SCA100T 丛书 Figure 5. Typical temperature dependency of SCA100T sensitivity SCA100T典型温度变化引起灵敏度偏移曲线图 1.8.1 外部补偿 Additional External Compensation To achieve the best possible accuracy, the temperature measurement information and typical temperature dependency curves can be used for SCA100T offset and sensitivity temperature dependency compensation. The equation of fitted 3rd order polynome curve for offset compensation is: 为了得到高的精度，除了通过上面的曲线图进行了解以外，还可以通过计算进行补偿，计算公式如下：求平均温度曲线方程式 Offcorr =-0.0000006*T3+0.0001*T2-0.0039*T-0.0522 Where: Offcorr: 3rd order polynome fitted to average offset temperature dependency curve平均角度温度曲线结果 T °C(参考第2.7节) temperature in °C (Refer to paragraph 2.7 Temperature Measurement) The calculated compensation curve can be used to compensate the temperature dependency of the SCA100T offset by using following equation: 使用合适的方程可以弥补因温度变化引起的输出角度的偏移： OFFSETcomp=Offset-Offcorr Where: OFFSETcomp 经校正的度数(因温度变化) temperature compensated offset in degrees Offset 没有经过校正的实际度数Nominal offset in degrees The equation of fitted 2nd order polynome curve for sensitivity compensation is: 为灵敏度曲线进行补偿的方程式是: 求平均灵敏度温度曲线方程式：Scorr=-0.00011*T2+0.0022*T+0.0408 6 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 科技 SCA100T 丛书 Where: Scorr: 平均灵敏度温度曲线结果2nd order polynome fitted to average sensitivity temperature dependency curve T temperature in °C The calculated compensation curve can be used to compensate the temperature dependency of the SCA100T sensitivity by using following equation: 使用合适的方程可以弥补因温度变化引起的灵敏度偏移： SENScomp=SENS*(1+Scorr/100) Where: SENScomp 经校正的灵敏度(因温度变化)temperature compensated sensitivity SENS 没有经过校正的灵敏度Nominal sensitivity (4V/g SCA100T-D01, 2V/g SCA100T-D02) The typical offset and sensitivity temperature dependency after external compensation is shown in the pictures below. 经过外部补偿后的典型温度引起灵敏度、角度变化的关系图 Figure 6. The temperature dependency of an externally compensated SCA100T offset Figure 7. The temperature dependency of an externally compensated SCA100T sensitivity 7 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

VTI 科技 SCA100T 丛书 2. 功能描述 Functional Description 2.1 测量方向 Measuring Directions VOUT > VOUT =2.5V > VOUT Figure 8. The measuring directions of the SCA100TSCA100T 的测定方向 2.2 电压到角度转换 Voltage to Angle Conversion Analog output can be transferred to angle using the following equation for conversion: 把输出的模拟量转换为角度的方程式是： α= arcsin [(Vout-offset)/Sensitivity] 公式中：offset是在0°输出的电压值(电压2.5v)，Sensitivity是芯片灵敏度(SCA100T-D01是4v) Vout是芯片输出的模拟量where: Offset = output of the device at 0° inclination position, Sensitivity is the sensitivity of the device and VDout is the output of the SCA100T. The nominal offset is 2.5 V and the sensitivity is 4 V/g for the SCA100T-D01 and 2 V/g for the SCA100T-D02。角度接近于0°时，可用以下简化方程式计算，计算结果的准确性可通过下表了解。Angles close to 0° inclination can be estimated quite accurately with straight line conversion but for the best possible accuracy, arcsine conversion is recommended to be used. The following table shows the angle measurement error if straight line conversion is used. Straight line conversion equation: 简化转换方程式： α=(Vout-offset)/Sensitivity (单位：度) Offset：0°输出电压2.5v 公式中：Sensitivity = 70mV/° (SCA100T-D01)或Sensitivity = 35mV/° (SCA100T-D01)Where: Sensitivity = 70mV/° with SCA100T-D01 or Sensitivity= 35mV/° with SCA100T-D02 使用简化公式计算结果与实际倾斜角度之间的误差： Tilt angle [°] 实际倾斜角度 0 1 2 3 4 5 10 15 30 Straight line conversion error [°] 使用简化方程计算引起的误差 0 0.0027 0.0058 0.0094 0.0140 0.0198 0.0787 0.2185 1.668 2.3 公制的输出比率 Ratiometric Output Ratiometric output means that the zero offset point and sensitivity of the sensor are proportional to the supply voltage. If the SCA100T supply voltage is fluctuating the SCA100T output will also vary.When the same 8 / 17 VTI Technologies Oy Subject to changes www.vti.fi Doc. nr. 8261800 Rev.A

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